Abstract
Investigating the time-dependent behavior of mechanical systems is very crucial when the performance of a system fluctuates over time. The dynamic behavior of the MEMS and NEMS is probably simulated for time-dependent applied voltage (i.e., AC voltage) or even to assess the time-dependent performance of systems under the DC voltage. In this chapter, some mathematical approaches are proposed to solve the nonlinear partial differential equation describing the dynamic performance of MEMS and NEMS. Furthermore, the time-dependent behavior of typical MEMS/NEMS is investigated by using the proposed solution methods.
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