Abstract
Carbon-based film is a type of material with carbon as the main component that is obtained by physical vapor deposition or chemical vapor deposition technology. It mainly includes diamond film, diamond-like carbon film with mainly sp3 structure, graphite-like carbon film with mainly sp2 structure, and polymer-like carbon film with high hydrogen content and similar hydrocarbon polymer characteristics. Carbon-based film exhibits many excellent physical and chemical properties by adjusting composition and structure, such as high hardness, low friction, high wear resistance, chemical stability, and good biocompatibility. Therefore it has a variety of special functions to meet the needs of aerospace, military industry, information, energy, medical, high-end manufacturing, and other fields.
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