Abstract
To realize the large displacement measurement in the practical engineering by using the linear CCD sensors,a measuring system of linear CCD displacement sensors based on the differential measurement method is proposed.According to the problem exciting in the linear CCD displacement measurement and the relationship between pixel space and drive pulse in the linear CCD sensors,a differential measurement method which uses time as a reference point is proposed.This method uses two linear CCD sensors aligned in a space and staggered with half of integration period in time to test position changes of the light transmission which is equally spaced in the light baffle.By calculating the value of time difference of optical signals from the two linear CCD sensors and using the uniform scanning measurement principle,the spatial displacements are obtained.After the calibration of the Ren-ishaw laser interferometer,the measuring errors of the developed linear CCD displacement sensors are controlled within±2μm for an effective measuring range of 600.05mm.It concludes that the feasibility of large precision displacement measurement using the linear CCD sensors is verified with the differential method.
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