Abstract
The linear displacement sensor is widely used in industrial measurement. The linear displacement sensor with measuring range less than 200mm is usually measured on a universal length measuring instrument. There is no good method to calibrate linear displacement sensor with measuring range larger than 200mm. The calibration system of linear displacement based on coordinate measurement and dual frequency laser interference is developed. The guide rail and measuring positioning system of coordinate measuring machine is used. The sampling signal of dual frequency laser interferometer is connected with the pulse signal triggered by coordinate measuring machine. The accurate position information of the linear displacement sensor is obtained and processed by industrial computer. According to JJF 1305-2011 Calibration Specification for Linear Displacement Sensor, a large range of linear displacement sensors is calibrated. The accuracy and reliability of linear displacement calibration system based on coordinate measurement and laser interference is verified.
Highlights
Linear displacement sensor is used to measure displacement, distance, position, strain, etc
This paper mainly deals with the calibration of linear displacement sensors with measuring range between 200mm and 1000mm
The calibration system of line displacement based on coordinate measurement and dual frequency laser interference is developed
Summary
Linear displacement sensor is used to measure displacement, distance, position, strain, etc. Coordinate measuring machine is regarded as one of the most typical measuring instruments in length measurement. It can be used in automatic precise positioning. The linear displacement calibration system involves direct measurement of laser interferometer and the precise positioning of coordinate measuring machine. The Leitz coordinate measuring machine is used as the precision motion table, and the laser frequency is used as the length standard to calibrate the absolute displacement of the linear displacement system. The linear displacement sensor with measuring range less than 200mm can be measured on a high-precision universal length measuring instrument.
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