Abstract

In order to time grating measurement principle application to the field of optical measurement, a uniform scan coordinate system by using photosensitive element of timing driven is presented to convert the displacement detection of the object into measured time difference. According to the conversion principle of relative motion coordinate systems of time grating, when view the photosensitive element of linear CCD as a uniform scanning coordinate system, view the spatial side by side and timing of mutually staggered on the two linear CCD as a stationary coordinate system, after measured the time difference variation of the output electric signal on the different CCD for the same object, size and direction of the relative displacement of the object would be made by multiplying time difference variation and scanning speed. With the calibration of the Renishaw laser interferometer for the developed linear CCD displacement sensor, the measuring errors are controlled within after error correction in the effective measuring range of 600.05mm. This realizes the idea of time measuring space in the field of optical.

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