Calculation of sputtering yields under high-fluence bombardment of a Cu xNi 1-x alloy

Abstract

Under 2 keV Ar ion bombardment of a Cu xNi 1−x alloy, at high fluence and at low temperature, Cu and Ni sputtering yields, the total sputtering yield (Cu+Ni yields), and the sputtering yields from the first surface layer and from beneath this layer for Cu and Ni, have been separately calculated by an improved kinetic BIGS (bombardment-induced Gibbsian segregation) model. Calculations indicate that these sputtering yields are strongly dependant on the Cu (segregating species) bulk composition. A cause of the possible correlation between sputtering angular distribution and bulk composition of the segregating species is also analysed for the segregating system.