Sputtering of Au, Csl and LiNbO 3 by multiply charged Ar ions

Abstract

We have bombarded targets of Csl, LiNbO 3 and Au with 48, 48 and 60 keV Ar q+ ions, respectively, for q = 4, 8 and 11. To look for any possible ejection mechanisms related to the primary charge state q of the projectile, we have examined the total (neutral plus ionic) differential angular sputtering yields and total integrated sputtering yields as a function of q. Our measurements were made using a collector technique: sputtered material was captured on foils surrounding the target, which were subsequently analyzed using heavy ion Rutherford backscattering spectroscopy to determine angular distributions; total sputtering yields were obtained from the angular distributions. No significant variation was observed in the yield from the Au target, but slight ( ~ 10%) enhancements in the total yields from the insulating targets were measured as the projectile charge state was increased from 4 + to 11 + .