Calculation of coating growth rate using extended magnetron spray systems

Abstract

The paper considers the theoretical distribution of the substance flow sprayed by an extended magnetron into cylindrical shells and radiation from a unit of the source length to a unit of the substrate length. A computational model is presented and an expression is obtained for determining the growth rate of the coating on the shell placed on the planetary carousel. The theoretical calculation of the growth rate of the coating and the results of its experimental verification are given on the example of applying a chromium-based coating to full-size cylindrical shells by magnetron sputtering. The methodology and results of determining the possible number of technological processes of coating before the wear of the target are presented.