A simplified Monte-Carlo calculation to model ion–solid interactions in the classroom

Abstract

We have developed an Ion–Solid Interaction course, for graduate and undergraduate students, which combines lecture, experimental work, and computational modeling. The lectures cover the basic physical principles necessary to understand the interactions of energetic ions with solids, as well as practical technological applications such as sputtering (deposition, patterning, depth profiling), ion beam analysis, and ion implantation. The experiments involve the fabrication of thin films by sputtering deposition and their characterization by ion beam analysis, as well as other techniques. In the computational modeling the students develop a ‘TRIM-like’ or Monte-Carlo calculation to determine the various parameters associated with the slowing down and penetration of ions in solids. In doing so they have the opportunity to put into practice most of the basic concepts learned in class. We describe here this computational modeling, and present examples of calculations performed by the students.