Abstract
A review of the main available methods of background removal in Auger electron Spectroscopy and X-ray photoelectron Spectroscopy is given. The major features, assumptions and results of theoretical works, which form the basis of the present method, are presented. This method uses a convolution technique of the experimental spectrum with the single event loss function. It has been applied to Auger electron spectra (Si, Ag, Fe, Ni, Cu, Al). When Auger energy is sufficiently low (Si, Ag), it has been assumed that Auger electrons act as a secondary electrons source within a multiplet energy range. In every case results are satisfactory.
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