A fast and simple method for background removal in Auger electron spectroscopy.

Abstract

A purely formal method for background removal in electron beam induced Auger electron spectroscopy is presented. The method has been developed for practical purposes. It is typically used to remove the background of a complete recorded spectrum, no fit is necessary to remove the backscattered electrons background. An overcompensation of the background, resulting in negative values of the background removed spectrum is not possible, all values of the background removed spectrum are positive or zero. Since the Auger peaks are separated by zeros after background removal, the method is well suited for peak finding and identification.