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Abstract
Abstract The inclined structures of threading screw dislocations (TSDs) in silicon carbide (SiC) were analyzed to observe dislocations located deep inside a crystal using X-ray topography (deep XRT). In the deep XRT of a 00012 diffraction, the strain fields of TSD core-lines from the sample surface to a depth of 90 μm were projected on a detector. We propose a method for analyzing the inclined structure of a real TSD from a TSD projected onto a detector. The inclined direction and angle of the real TSD were estimated by correcting the terminal coordinate of the projected TSD core-line. Furthermore, the mixed components of the Burgers vector of TSDs were verified using a discriminant method based on <112(−)8> grazing-incidence X-ray topography. Each inclined direction index was close to the mixed components in the observed TSDs, supporting the correspondence between the two.
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