Abstract
The simultaneous and independent measurements of two-dimensional (2D) displacements are significant for 2D positioning. Here a planar inductive sensor which is based on the principle of electromagnetic induction is proposed. The sensor is composed of a primary coil and a secondary coil. The primary coil consists of an array of planar spiral coils which are arranged as an m × n matrix. The primary coil is supplied with 4 kHz alternating current to generate an array of pulsating magnetic field. The secondary coil contains four spiral coils which are arranged as a 2 × 2 matrix. Thereby, four roads of modulated signals whose amplitudes vary with displacements of the secondary coil along x- and y-axis are induced. An algorithm based on the Coordinate Rotation Digital Computer algorithm is introduced to resolve the planar displacements. The structure and working principle of the sensor are proposed firstly. Then, the finite element analysis of the electromagnetic model and the numerical simulation of the algorithm are given. An experiment has been performed on a sensor prototype and the results show that the proposed scheme is feasible. Measurement error analysis of the sensor has been pursued at the end of the paper.
Highlights
The development of semiconductors and micro-electronics industry has been attracting great attention in the area of rapid and precise two-dimensional (2D) positioning, where the motion control and the 2D displacement measurement are vital [1,2]
A pair of laser interferometers or linear encoders which are mounted orthogonally are usually utilized for the 2D displacement measurement
Thereby, the magnetic flux density generated by the primary coil is similar to an array of pulsating magnetic field as shown as Figure 3b
Summary
The development of semiconductors and micro-electronics industry has been attracting great attention in the area of rapid and precise two-dimensional (2D) positioning, where the motion control and the 2D displacement measurement are vital [1,2]. The optical planar encoders have been developed for the 2D displacement measurement. A planar displacement sensor with inductive spiral coils was presented in [22]. A 2D sensor with spiral coils was developed in [23], and the measurement range was 140 mm × 140 mm while the linearity was 1%. The optimal useful measurement range was obtained if the gap of 0.23 mm was inserted in the stationary coil [25] In another method, spiral coils have been utilized for displacement sensing. A planar spiral coil-based inductive displacement sensor was presented [27]. The worst case error was andcoils the novel and manufactured 2D inductive sensor using spiral coils is proposed.
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