Abstract
A new microvalve actuator driven by electrostatic force is described and shown to be suitable for controlling the flow of a rarefied gas. The actuator consists of a pair of planar electrodes sandwiching a conductive film that has an S-shaped bend in the middle. The S-bend moves back and forth as voltage is alternately applied between each of the electrodes and the film. A manually assembled macromodel actuator having a film 5 mu m thick and 12 mm wide is operated between electrodes separated by 2.5 mm. The propagation speed is 4.0 m s-1 at an applied voltage of 150 V. The large vertical displacement of the film enables the large valve seat lift necessary to allow a certain amount of gas flow. An experimental model of the valve allowed at airflow rate of 10 sccm at a pressure of 60 Pa.
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