Abstract
We report on a new type of micromachined electrostatic actuator with an S-shaped film element. The actuator consists of a pair of planar electrodes with an S-shaped film between them. The S-bend film moves back and forth through switching on applied voltage to each electrode plate. An advantage of this actuator is that it allows vertical film displacement to the order of several hundreds of micrometers. The actuator is suitable for gas control devices which require large conductance under rarefied pressure conditions. We made a prototype S-shaped microactuator by using micromachining technologies. It was composed of three stacked wafers. We succeeded in constructing an S-shaped film element with a structure height of 220 /spl mu/m and a thickness of 0.4 /spl mu/m. The S-shaped film was able to be operated by electrostatic force when the applied voltage was about 70 V.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
