Abstract
A microvalve actuator driven by electrostatic force and suitable for a rarefied gas flow control system is proposed. The actuator consists of a pair of planar electrodes sandwiching a conductive film. The film has an S-shaped bend in the middle. The S-bend moves back and forth as voltage is applied between the film and each of the electrodes alternately. The actuator makes possible the large valve seat lift that is necessary to allow a certain amount of gas flow. A macro model of the actuator allowed investigation of motion in the system. A film 5- mu m thick and 12 mm wide was successfully operated between electrodes separated by 2.5 mm. The observed propagation speed was 4.0 m/s when the applied voltage was 150 V.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
