Abstract

Abstract This paper presents an optimized, lithographically patternable SU-8/Graphene nanocomposite based piezoresistive strain sensor for localized, high-precision assessment, which marks a significant advancement in the field of soft-MEMS based technologies. The fabrication process involves the photolithography of a SU-8/Graphene nanocomposite with a minimum resolution of 50µm, resulting in a material with excellent electrical conductivity and mechanical properties. Specifically, a 3% SU-8/Graphene composition was chosen to exceed the percolation threshold, enabling substantial changes in the resistance %ΔR/R and facilitating photopatternability. The sensor exhibited exceptional performance characteristics, including a rapid response time of 0.1 seconds and a wide bending range from 0o to 60o. Notably, it demonstrated a remarkable %ΔR/R of 19.21, indicating its superior sensing capability. Such high sensitivity is crucial for applications that require precise, localized measurements, such as biomedical engineering, sports science, and smart healthcare.

Full Text
Paper version not known

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.