Abstract
Advanced precise and accurate nanomeasurement techniques play an important role to improve the function and quality of surface characterization. There are two basic approaches, the hard measuring techniques and the soft computing measuring techniques. The advanced soft measuring techniques include coordinate measuring machines, roundness testing facilities, surface roughness, interferometric methods, confocal optical microscopy, scanning probe microscopy, and computed tomography at the level of nanometer scale. On the other hand, a new technical committee in ISO is established to address characterization issues posed by the areal surface texture and measurement methods. This paper reviews the major advanced soft metrology techniques obtained by optical, tactile, and other means using instruments, classification schemes of them, and their applications in the engineering surfaces. Furthermore, future trends under development in this area are presented and discussed to display proposed solutions for the important issues that need to be addressed scientifically.
Highlights
Surface metrology became very important in many branches of science and industry
These methods allow for testing of paper for special applications, analysis of old prints and marks of physicochemical impurity, or analysis connected with the deposition of a drop of ink from the printer
A review of advanced measuring techniques in the dimensional and surface metrology and their applications from micro- to nanoscale has been presented in detail
Summary
Surface metrology became very important in many branches of science and industry. Study of dimensional and surface nanometrology is becoming more commonplace in many applications and research environments as well as data treatments dealing with standardized rules. Surface characterization using advanced accurate and precise nanomeasuring techniques are important tools especially in the production engineering, tribology, biotechnology, and criminology. Because of this diversification, there are more advanced metrology techniques using stylus, optical, and nonoptical methods used for analyzing the surface characteristics, where each technique has its own specific applications [1]. The ISO technical committee TC-213 in the field of dimensional and geometrical product specifications and verification formed a working group WG-16 to address standardization of areal (3D) surface texture and measurement methods, and to review existing standards on traditional profiling (2D) methods including characteristics of instruments. Future directions under development will be presented and discussed scientifically in order to introduce proposed solutions for the issues that need to be addressed in the area of interest
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