Abstract

This paper provides an improved surface potential equation for compact modeling of dynamically depleted silicon-on-insulator MOS device. It removes the non-physical front-gate capacitance prediction and the discontinuity at the flat-band condition present in previous works. It also includes for the first time the back gate effect observed at negative back gate voltage when the silicon film is partially depleted. It relies on, firstly, an approximated description of the front-depletion/back-accumulation mode of operation that has always been ignored by now, and secondly, an appropriate mathematical conditioning. The model is validated by 3D TCAD simulations.

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