Abstract
We prepare the PN junction on silicon chip by a novel method with surface plasmon generated under pulsed laser irradiation. It is found that the interaction between laser photons and plasma produces a plasmon layer, in which the faster electrons take resonance with photons to generate surface electron gas. It is interesting that the electron gas in high vacuum and the plasmon polarized in various atmosphere are directly observed by the Talbot reflect image with outstanding challenge. It is demonstrated that injection and diffusion can be completed quickly to form higher quality PN region on interface between ions layer and substrate while the plasmon dipole makes resonance with phonon, where the quantum energy of plasmon is closed to the phonon energy in silicon crystal. In this novel way, the PN junction structure can be built by coherent photons on silicon chip at first, and the different preparing processes are explored comparatively by using the I-V curves measured with nonlinear characteristic of PN junction for application in optic-electronic integration field.
Published Version
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