A tri-arc system for growing high-purity crystals of metallic materials

Abstract

A tri-arc Czochralski crystal growth system, for preparing high-purity crystals of metallic materials, is described. To improve the environmental cleanliness within the chamber beyond that found in conventional tri-arc systems, the equipment is built to ultra-high-vacuum standards (although actual operation in vacuum is not possible) so that leaks into the system and degassing of contaminating gases from the chamber walls during growth are minimized. Crystal growths of the intermetallic compounds TiAl and HoCo 2 are illustrated.