Abstract
Partial equilibrium thermodynamic calculations were used to simulate the MOCVD of chromium and of chromium carbide films starting from Cr(C6H6)2. They showed that by simultaneously increasing the operating pressure and decreasing the precursor molar fraction, the carbon content of the films can be decreased. A modification of the composition of the reactive gas on the growing surface to a C6H6/Cr value of 0.2 was proposed in order to fit available experimental data. This surface composition at equilibrium is in excellent agreement with estimates made by using a model based on the control of deposition and consequently of carbon incorporation by surface adsorption of benzene.
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