Abstract
Surface morphology and conductivity properties of semiinsulating GaN epitaxial layers are studied. Improvement of insulating properties with carbon or iron doping level increase is limited by morphology deterioration. Morphology development is different for these two cases. Co-doping with carbon and iron allows keeping planarity with significant improvement of insulating properties.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
