Abstract
GaAs-based heterostructures grown by metalorganic vapor-phase epitaxy on virtual Ge/Si substrates using an AlxGa1-xAs seed layer with different aluminum content x in the solid solution are investigated. The effect of solid solution composition on the density and size of antiphase domains emerging on the sample surface and on the optical properties of the GaAs layer is shown. Si(100) substrates with a small unintentional miscut of 0.7° to [110] were used for growth.
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