Abstract
In this work gas discharge ignited by gyrotrone radiation with frequency 1THz were carried out. Breakdown curves were calculated both for selfignited and initiated discharges. There was shown that in case of breakdown by the pulse radiation with duration longest then several microseconds electric field threshold is the same as in case of continuous wave breakdown. Also the possibility of using a terahertz gyrotron as a radiation source for discharge in gas targets on installations for extreme ultraviolet photolithography was assessed.
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