Abstract
In this work, gas discharge ignited by girotron radiation with frequency 1 THz was carried out. Breakdown curves were calculated both for selfignited and initiated discharges. There was shown that in a case of breakdown by the pulse radiation with duration longer than several microseconds electric field threshold is the same as in a case of continuous wave breakdown. Also, the possibility of using a terahertz gyrotron as a radiation source for discharge in gas targets on installations for extreme ultraviolet photolithography was assessed. Keywords: girotron, terahertz breakdown, extreme ultraviolet lithography.
Full Text
Published Version (
Free)
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call