Abstract
AbstractIt is demonstrated that a argon cluster ion beam can be used for the finishing treatment of ultrasmooth surfaces (with initial root-mean-square roughness below 0.3 nm) of potassium titanyl phosphate single crystals. Analysis of the power spectral density function of surface roughness showed that cluster-ion irradiation leads to removal of residual chemical contaminations from the subsurface layer and produces additional smoothing of the crystal surface in a broad range of spatial frequencies (ν = 0.2–100 μm^–1).
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