Hydrogen diffusion in single crystal and polycrystalline zinc oxide was investigated by deuterium diffusion and hydrogen effusion experiments. Deuterium concentration depth profiles were measured as a function of the passivation temperature, while in H effusion experiments the molecular hydrogen flux was measured as a function of the heating rate. The diffusion coefficient exhibits thermally activated behavior and varies between ${E}_{A}=0.17$ and $0.37\phantom{\rule{0.3em}{0ex}}\mathrm{eV}$. The change of ${E}_{A}$ is accompanied by a change of the diffusion prefactor by eight orders of magnitude. This indicates that ${E}_{A}$ is not related to the energetic position of H transport sites or the barrier height between such sites. Using the microscopic diffusion prefactor, the position of the hydrogen chemical potential, ${\ensuremath{\mu}}_{H}$, was estimated. With increasing temperature, ${\ensuremath{\mu}}_{H}$ decreases with a rate of $\ensuremath{\approx}0.0013\phantom{\rule{0.3em}{0ex}}\mathrm{eV}∕\mathrm{K}$. At H concentrations of less than ${10}^{17}\phantom{\rule{0.3em}{0ex}}{\mathrm{cm}}^{\ensuremath{-}3}$ ${\ensuremath{\mu}}_{H}$ is pinned. The hydrogen density of states was derived from H effusion data, which is consistent with a diffusion activation of about $1.0\phantom{\rule{0.3em}{0ex}}\mathrm{eV}$ as was originally reported by Mollwo [Z. Phys. 138, 478 (1954)] and Thomas and Lander [J. Chem. Phys. 25, 1136 (1956)]. Clear evidence for hydrogen deep traps was found in single crystal and polycrystalline $\mathrm{ZnO}$.
Read full abstract