We present measurements of the variation of the scattered ion yield from 10 keV and 16 keV N 6+ ions and 10 keV N 4+ ions scattered along the [1 1 0] direction of a single crystal Al(110) surface, depending on the angle of incidence. The reflected N 1+ ions were detected under θ = 35° relative to the incoming beam. The radius of the shadowcone formed behind a target atom and thus the variation of the scattered ion yield depends on the interaction potential. Monte Carlo simulations were performed to simulate the particle flux at the shadowcone edge and the scattered ion yield depending on the angle of incidence. From a comparison with the experimental data, information on the scattering potential is deduced. The experimental results can be reproduced using the ZBL potential with significantly smaller, charge state dependent screening lengths.
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