Abstract
Abstract Energy spectra for 1 MeV He ions scattered by a Si single crystal over an angle of 58° were measured for incident directions along the 〈110〉 string and a number of directions 4° off the string: {100}, {110} and {111} planes as well as three non-channeling directions. The measurements were performed at a temperature of 164 K, under glancing-exit-angle conditions. The experimental spectra were reproduced by Monte Carlo simulation, and a x 2 analysis procedure was developed to determine the thermal vibrational amplitude in Si. Two ion-atom potentials used in the calculations (the ZBL potential and a Hartree-Fock potential) yielded essentially the same amplitude of 0.066(2) A. The corresponding Debye temperature of 490(15) K agrees well with recent determinations by other methods.
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Schedule a callMore From: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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