In this paper, a three-dimensional multi-physics coupling model (thermal model, electromagnetic field model and structural model) is proposed for analyzing and controlling the vibration of wire electrode in cutting thin plate process. Firstly, a three-dimensional thermal model is developed to evaluate temperature distribution of wire electrode considering heat convection and heat conduction, and the numerical solutions of wire temperature increment are performed under different process parameters. Secondly, the mechanism of electromagnetic force acting on wire tool is clarified in detail, and a spacial finite element method (FEM) program is designed to analyze the electromagnetic field considering electromagnetic induction. Then, combining thermal model with electromagnetic field model, and conventional structural model, a multi-physics coupling model is established to acquire the frequency and amplitude of wire vibration under random multiple-spark discharges. Furthermore, the simulational results of multi-physics coupling model on wire vibration show a good agreement with experimental data, and the influencing rules of processing parameters on wire vibration are also illustrated to seek the best parameter combination. Eventually, three practical methods are presented to restrain wire vibration performance, and the significant effects on suppressing the wire vibration and improving geometric accuracy have been obtained. • A three-dimensional characteristics analysis of the wire-tool vibration considering spatial temperature and electromagnetic field has been carried out in this paper. Furthermore, combining the thermal model with electromagnetic field and structural mechanics, a multi-physics coupling model has been developed to calculate frequency and amplitude of wire vibration by finite element method. • A set of Taguchi experiment ( L 27 5 3 ) has been performed to investigate the reliability and feasibility of the proposed coupling model. Moreover, the simulational results of multi-physics coupling model on wire vibration show a good agreement with experimental data. • Three practical methods have been presented to restrain wire vibration performance, and the lateral vibration has been reduced with approximately 50% and corner-accuracy of a workpiece has been improved significantly.