Investigations of the dependence of the ferromagnetism of MnxSi1-x (x ∼ 0.5) films on the energy spectrum of target plume particles are topical for spintronics. The time-of-flight (TOF) method using a Langmuir probe has been used to study the dynamics of a laser plume during ablation of a SiMn target in vacuum and in an atmosphere of He, Xe, Ar, N2 buffer gases in a wide pressure range from 10−6 to 4∙10−1 mbar. The TOF curves of the probe signal have been obtained by ablation of the SiMn target by the second harmonic of the Q-switched Nd:YAG laser. A nonmonotonic dependence of the probe signal amplitude on the buffer gas pressure was established. A feature of the delay of the TOF curve signal from the moment of target ablation as a function of the N2 pressure in the chamber was revealed, which was explained by the resonant scattering of the Si + ion and the N2 nitrogen molecule. The most suitable gases for control of the ion velocity were selected based on the dynamics of the laser plume. The dependence of the electrical characteristics of MnxSi1-x (x ∼ 0.5) films on the pressure of helium and argon has been established.