Design optimization and performance of a micro thermoelectric generator (μTEG) using human body heat are investigated. A newly introduced thin-film π-type μTEG module structure using vacuum/insulator-hybrid thermal isolation with the convex-shape hot plate is useful to achieve a high thermal resistance of the module and also to suppress the unwanted heat flow passing through the supportive wall structure for the vacuum isolation. The optimum design of this μTEG module can exhibit sufficiently high output power suitable for a power source of self-powered wearable devices.