During the operation of such machines as aviation engines and land based gas turbines, the obligatory vibration monitoring is carried out which is focused on the prevention of their possible damages and destructions during the work on resonant modes or because of material fatigue. Nowadays, as a rule, the standard or additional equipment is used for such control which includes as a component various types of one-axial vibration gauges. In most cases, the control is carried out continuously, and the frequency of registration can differ from several values for a flight to several values in a second. The data received during routine vibration monitoring is peak values of vibrations. They are diagnosed, using the pre-start control and some ways of fit and the tendency of changes of vibration during the operation. Microelectromechanical systems gaining now the increasing distribution (MEMS), as a rule, allow to obtain the data about vibro-acceleration without giving data about the frequency vibration characteristics. But also the regular equipment of vibrational control used during the operation of considered machines does not give data about the frequency vibration characteristics. However, microelectromechanical devices allow to obtain the data with the essential higher frequency of sample rate (in tens and hundreds times) in comparison with mass equipment used now for control, and to carry out the simultaneous control of vibration on three axes using one gauge. Apart from the vibration peak value the position relative to a reference point is fixed. Does the information received according to mentioned above features have better diagnostic potential? Will the array dimension received during data verification be an obstacle to the operational processing? Materials of the present article are an attempt to give answers to these questions and to make representation about possibility and features of an estimation of a technical state of machines by the results of processing of time series vibro-accelerations received with the use of such processing microelectromechanical systems. It is represented that the way of data processing of vibrating monitoring considered in the article at sufficient simplicity of realization allows to solve the problem of an estimation of a technical state of monitoring item.