Laser beam wave-front measurement is important for laser beam quality evaluation and beam control. In this paper we report on a laser beam wave-front sensor consisting of a phase detector and a scanner. With the use of this sensor, the wave-front phase profile across a hydrogen fluoride (HF) laser beam has been obtained. The major advantages of this technique are that it is fast, sensitive, and compact. Other features are electric scanning, self-alignment, noise cancellation, and no drift. Wave-front sensor operational principles, features, and experimental results are presented. The sensitivity of the sensor was 5°. This sensitivity corresponds to the change of beam quality parameter, the Strehl ratio, by 1%. Hence it is a sensitive beam quality measurement technique.
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