Wave Gyroscope Research Articles

Enhanced Sensitivity of a Surface Acoustic Wave Gyroscope

In this paper, we present an optimal design and performance evaluation of a surface acoustic wave (SAW) gyroscope. It consists of a two-port SAW resonator (SAWR) and a SAW sensor (SAWS) structured using a delay line pattern. The SAW resonator provides a stable reference vibration and creates a standing wave, and the vibrating metallic dot array at antinodes of the standing wave induces the second SAW in the normal direction by the Coriolis force, and the SAW sensor is used to detect the secondary SAW. By using the coupling of modes (COM), the SAW resonator was simulated, and the effects of the design parameters on the frequency response of the device were investigated. Also, a theoretical analysis was performed to investigate the effect of metallic dots on the frequency response of the SAW device. The measured frequency response S21 of the fabricated 80 MHz two-port SAW resonator agrees well with the simulated result, that is, a low insertion loss (∼5 dB) and a single steep resonance peak were observed. In the gyroscopic experiments using a rate table, optimal metallic dot thickness was determined, and the sensitivity of the fabricated SAW gyroscope with an optimal metallic dot thickness of ∼350 nm was determined to be 3.2 µV deg-1 s-1.

Enhanced Sensitivity of Novel Surface Acoustic Wave Microelectromechanical System-Interdigital Transducer Gyroscope

In this paper, we present a novel microelectromechanical system-interdigital transducer (MEMS-IDT) surface acoustic wave (SAW) gyroscope with an 80 MHz central frequency on a 128° YX LiNbO3 wafer. The developed MEMS-IDT gyroscope is composed of a two-port SAW resonator, a dual delay line oscillator, and metallic dots. The SAW resonator provides a stable standing wave, and the vibrating metallic dot at an antinode of the standing wave induces the second SAW in the normal direction of its vibrating axis. The dual delay line oscillator detects the Coriolis force by comparing the resonant frequencies between two oscillators through the interference effect. The coupling of mode (COM) modeling was used to extract the optimal design parameters prior to fabrication. In the electrical testing by the network analyzer, the fabricated SAW resonator and delay lines showed low insertion loss and similar operation frequencies between a resonator and delay lines. When the device was rotated, the resonant frequency differences between two oscillators linearly varied owing to the Coriolis force. The obtained sensitivity was approximately 119 Hz deg-1 s-1 in the angular rate range of 0–1000 deg/s. Satisfactory linearity and superior directivity were also observed in the test.

Evaluation of a novel surface acoustic wave gyroscope

A novel type of gyroscope sensor using metal dot arrays on the surface of a surface acoustic wave (SAW) device has recently been independently proposed. In this paper, we report experimental trials of several devices fabricated to evaluate the effects described and also an order-of-magnitude estimate of the sensitivity to be expected. The conclusions are that this device is extremely insensitive as currently proposed.