Enhanced Sensitivity of a Surface Acoustic Wave Gyroscope

Abstract

In this paper, we present an optimal design and performance evaluation of a surface acoustic wave (SAW) gyroscope. It consists of a two-port SAW resonator (SAWR) and a SAW sensor (SAWS) structured using a delay line pattern. The SAW resonator provides a stable reference vibration and creates a standing wave, and the vibrating metallic dot array at antinodes of the standing wave induces the second SAW in the normal direction by the Coriolis force, and the SAW sensor is used to detect the secondary SAW. By using the coupling of modes (COM), the SAW resonator was simulated, and the effects of the design parameters on the frequency response of the device were investigated. Also, a theoretical analysis was performed to investigate the effect of metallic dots on the frequency response of the SAW device. The measured frequency response S21 of the fabricated 80 MHz two-port SAW resonator agrees well with the simulated result, that is, a low insertion loss (∼5 dB) and a single steep resonance peak were observed. In the gyroscopic experiments using a rate table, optimal metallic dot thickness was determined, and the sensitivity of the fabricated SAW gyroscope with an optimal metallic dot thickness of ∼350 nm was determined to be 3.2 µV deg-1 s-1.