Abstract
We developed a novel surface acoustic wave (SAW) gyroscope based on interference effect. It consists of a two-port SAW resonator (driving part) and a SAW sensor (sensing part) with a single phase unidirectional transducer (SPUDT) and three shorted grating reflectors that make sharp reflection peaks. The SAW induced by the Coriolis force interferes with the SAW generated from the sensor SPUDT in the reflective delay line. Coupling of mode (COM) modeling and simulation analysis were conducted to determine the device parameters. Then, the device was fabricated and measured on a rate table. Within the angular rate range up to 2000 deg/s, the sensitivity obtained is 0.019 ns(deg/s) <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-1</sup> .
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