Vertical-cavity Surface-emitting Laser Arrays Research Articles

Low-cost scanning LIDAR architecture with a scalable frame rate for autonomous vehicles.

Autonomous vehicles need accurate 3D perception with a decent frame rate and high angular resolution to detect obstacles reliably and avoid collisions. We developed a low-cost scanning multichannel light detection and ranging sensor architecture allowing scalable frame rates by adjusting the number of laser and detector pairs. Scanning is achieved by a pair of micro-electro-mechanical system (MEMS) mirrors. A control pattern for the MEMS mirrors to maximize the frame rate is presented. A built prototype based on the proposed architecture achieves a frame rate of 11.5Hz, a field of view of 70∘×30∘, and an angular resolution of 0.4°. The distance resolution is 6cm. Reliable single-shot detection for low-reflective objects up to 19m indoors and 11m under direct sunlight exposure is achieved. A performance assessment based on the presented measurement system for recently available vertical-cavity surface-emitting laser arrays with power densities up to 1k W/m m 2 shows promising improvement potential.

3D-printed facet-attached optical elements for connecting VCSEL and photodiodes to fiber arrays and multi-core fibers.

Multicore optical fibers and ribbons based on fiber arrays allow for massively parallel transmission of signals via spatially separated channels, thereby offering attractive bandwidth scaling with linearly increasing technical effort. However, low-loss coupling of light between fiber arrays or multicore fibers and standard linear arrays of vertical-cavity surface-emitting lasers (VCSEL) or photodiodes (PD) still represents a challenge. In this paper, we demonstrate that 3D-printed facet-attached microlenses (FaML) offer an attractive path for connecting multimode fiber arrays as well as individual cores of multimode multicore fibers to standard arrays of VCSEL or PD. The freeform coupling elements are printed in situ with high precision on the device and fiber facets by high-resolution multi-photon lithography. We demonstrate coupling losses down to 0.35 dB along with lateral 1 dB alignment tolerances in excess of 10 μm, allowing to leverage fast passive assembly techniques that rely on industry-standard machine vision. To the best of our knowledge, our experiments represent the first demonstration of a coupling interface that connects individual cores of a multicore fiber to VCSEL or PD arranged in a standard linear array without the need for additional fiber-based or waveguide-based fan-out structures. Using this approach, we build a 3 × 25 Gbit/s transceiver assembly which fits into a small form-factor pluggable module and which fulfills many performance metrics specified in the IEEE 802.3 standard.

Vertical Cavity Surface Emitting Laser Performance Maturing through Machine Learning for High-Yield Optical Wireless Network.

The high-yield optical wireless network (OWN) is a promising framework to strengthen 5G and 6G mobility. In addition, high direction and narrow bandwidth-based laser beams are enormously noteworthy for high data transmission over standard optical fibers. Therefore, in this paper, the performance of a vertical cavity surface emitting laser (VCSEL) is evaluated using the machine learning (ML) technique, aiming to purify the optical beam and enable OWN to support high-speed, multi-user data transmission. The ML technique is applied on a designed VCSEL array to optimize paths for DC injection, AC signal modulation, and multiple-user transmission. The mathematical model of VCSEL narrow beam, OWN, and energy loss through nonlinear interference in an optical wireless network is studied. In addition, the mathematical model is then affirmed with a simulation model following the bit error rate (BER), the laser power, the current, and the fiber-length performance matrices. The results estimations declare that the presented methodology offers a narrow beam of VCSEL, mitigating nonlinear interference in OWN and increasing energy efficiency.

An 8-A Sub-1ns Pulsed VCSEL Driver IC With Built-In Pulse Monitor and Automatic Peak Current Control for Direct Time-of-Flight Applications

An integrated laser diode driver for multi-junction vertical-cavity surface-emitting laser (VCSEL) arrays is presented in this brief. The driver chip, fabricated in 180nm bipolar-CMOS-DMOS (BCD) process, working under 12V supply, can pump more than 8A peak current into a triple-junction VCSEL array, producing up to 20.3W optical pulses. Measured optical pulses have tunable widths from 276ps to 2352ps with 120ps/160ps rise/fall time. When emitting 10MHz-frequency 960ps-width optical pulses with peak power ranging from 3.6W to 17.5W, the driver-VCSEL system has over 20% electrical-to-optical power conversion efficiency. The driver can record its output current waveform with a built-in pulse monitor. The peak data from the recorded waveform is used for automatic peak current control.

Modal characteristics of coupled vertical cavity surface emitting laser diode arrays

The modal characteristics of dual-element coupled vertical cavity surface emitting laser (VCSEL) arrays are analyzed numerically and experimentally. A photonic crystal pattern etched into the top mirror optically defines the two elements of the array that are independently electrically biased. Using a two-dimensional complex waveguide analysis, we incorporate the effects of varying temperature and electron plasma-induced index suppression arising from asymmetric injection. The simulations are compared to experimental characterization of output power, lasing spectra, and far-field beam profile as a function of the two independent injection currents. Three distinct operating regimes are identified for the arrays: single independent local mode; a region of two modes that are primarily localized into a specific cavity; and a region of two supermodes whose fields extend across both elements. This analysis provides a physical intuition for the behavior of the dual-element coupled VCSEL array across its full operating range for emerging applications.

Optical Uplink, D2D and IoT Links Based on VCSEL Array: Analysis and Demonstration

In this paper, vertical cavity surface emitting laser (VCSEL) array is used to establish gigabits/second (Gbps) optical uplink, device-to-device (D2D), and Internet-of-thing (IoT) links, as a supplementary for visible light communication (VLC) and ultra-low latency near-field communication in a typical indoor scenario. The mathematical model based on a modified Monte-Carlo ray-tracing (MMCR) algorithm for VCSEL-based optical wireless communication (OWC) is presented, which takes into account both accuracy and time complexity for the calculation of the channel characteristics including power distribution, impulse response, error analysis, and signal-to-noise ratio (SNR). Simulation firstly takes a global approach to the optical uplink lens design method, compared between Lambertian and Gaussian sources, and then extended six typical line-of-sight (LOS) or non-line-of-sight (NLOS) VCSEL-based OWC models. For demonstration, we adopted a 940-nm VCSEL array and 850-nm single-pixel VCSEL to establish LOS and NLOS systems after measuring the optics-electronics and bandwidth characteristics, respectively. Furthermore, multiple multi-carrier schemes are adopted to improve the OWC performance system based on a 940-nm VCSEL array including uniform-loading orthogonal frequency division multiplexing (OFDM), channel-coded OFDM, bit-loading/ power-allocation OFDM, and OFDM access (OFDMA). Results show that OFDM can effectively decrease the inter-symbol interference (ISI) of the indoor channel and increase the data rate, and the bit/ power-loading method achieves the highest 7.2 Gbps transmission with the bit error rate (BER) within the forward error correction (FEC). All the theoretical and experimental results, for the first time, provide a comprehensive design and optimizing process of VCSEL-based indoor high-capacity OWC systems for future optical uplink, D2D, and IoT applications.

Safety Analysis for Laser-Based Optical Wireless Communications: A Tutorial

Light amplification by stimulated emission of radiation (laser) sources has many advantages for use in high-data-rate optical wireless communications (OWCs). In particular, the low-cost and high-bandwidth properties of laser sources, such as vertical-cavity surface-emitting lasers (VCSELs), make them attractive for future indoor OWCs. In order to be integrated into future indoor networks, such lasers should conform to eye safety regulations determined by the International Electrotechnical Commission (IEC) standards for laser safety. In this article, we provide a detailed study of beam propagation to evaluate the received power of various laser sources, based on which and the maximum permissible exposure (MPE) defined by the IEC 60825-1:2014 Standard, we establish a comprehensive framework for eye safety analyses. This framework allows us to calculate the maximum allowable transmit power, which is crucial in the design of a reliable and safe laser-based wireless communication system. Initially, we consider a single-mode Gaussian beam and calculate the maximum permissible transmit power. Subsequently, we generalize this approach for higher mode beams. It is shown that the <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$M$ </tex-math></inline-formula> -squared-based approach for analysis of multimode lasers ensures the IEC eye safety limits; however, in some scenarios, it can be too conservative compared to the precise beam decomposition method. Laser safety analyses with consideration of optical elements, such as lens and diffuser, as well as for the VCSEL array, have been also presented. Skin safety, as another significant factor of laser safety, has also been investigated in this article. We have studied the impacts of various parameters, such as wavelength, exposure duration, and the divergence angle of laser sources on the safety analysis by presenting insightful results.

Separated electrodes for the enhancement of high-speed data transmission in vertical-cavity surface-emitting laser arrays.

In this work, a novel design for the electrodes in a near quasi-single-mode (QSM) vertical-cavity surface-emitting laser (VCSEL) array with Zn-diffusion apertures inside is demonstrated to produce an effective improvement in the high-speed data transmission performance. By separating the electrodes in a compact 2×2 coupled VCSEL array into two parts, one for pure dc current injection and the other for large ac signal modulation, a significant enhancement in the high-speed data transmission performance can be observed. Compared with the single electrode reference, which parallels 4 VCSEL units in the array, the demonstrated array with its separated electrode design exhibits greater dampening of electrical-optical (E-O) frequency response and a larger 3-dB E-O bandwidth (19 vs. 15 GHz) under the same amount of total bias current (20 mA). Moreover, this significant improvement in dynamic performance does not come at the cost of any degradation in the static performance in terms of the maximum near QSM optical output power (17 mW @ 20 mA) and the Gaussian-like optical far-field pattern which has a narrow divergence angle (full-width half maximum (FWHM): 10° at 20 mA). The advantages of the separated electrode design lead to a much better quality of 32 Gbit/sec eye-opening as compared to that of the reference device (jitter: 1.5 vs. 2.8 ps) and error-free 32 Gbit/sec transmissions over a 500 m multi-mode fiber has been achieved under a moderate total bias current of 20 mA.

Thermal Design of VCSEL Arrays for Optical Output Power Improvement

This study investigates the thermal design of 2-D vertical-cavity surface-emitting laser (VCSEL) arrays for optical output power improvement. Considering the temperature dependencies of bias current, internal quantum efficiency, internal optical loss, and thermal resistance of each array cell, a compact electro-opto-thermal model of 2-D VCSEL arrays with linear power dissipation and quadratic power dissipation in each array cell is established to study the effects of array cell spacing and layout on the device performance. At the same time, the power dissipation mechanisms contributing to thermal rollover are also studied. It is found that the array cell spacing has a strong influence on the linear power dissipation, and the layout (such as hexagonal design) influences quadratic power dissipation obviously. With the careful design of array cell spacing and layout, both the temperature profile and the thermal resistance matrix of VCSEL arrays are improved, which is helpful to delay the onset of thermal rollover and hence enhance the optical output power. The simulation results are consistent with experimental results.

A 20 Gbps PAM4 VCSEL driving ASIC for detector front-end readout

This paper presents the design and the test results of a 20 Gbps 4-level Pulse Amplitude Modulation (PAM4) Vertical Cavity Surface Emitting Laser (VCSEL) driving ASIC fabricated in a 55 nm CMOS technology for detector front-end readout. The PAM4 VCSEL driving ASIC consists of a Least Significant Bit (LSB) channel, a Most Significant Bit (MSB) channel and a novel PAM4-core output driver stage. This PAM4 VCSEL driving ASIC has been integrated in a customized optical module with the VCSEL array, and both the electrical function and the optical performance of the ASIC have been fully evaluated. The optical test results show that the Ratio Level Mismatch (RLM) of 20 Gbps eye diagram is 0.96, the Transmitter Dispersion Eye Closure Quaternary (TDECQ) is 0.63 dB, and the optical modulation amplitude is 761 μW.

Analysis of optical and thermal properties of 940-nm vertical-cavity surface-emitting lasers

We achieve 13.5 mW optical output power, 48% power conversion efficiency, 1.17 W/A slope efficiency and 17 kW/cm2 laser power density with top-surface-emitting 940 nm oxide-confined vertical-cavity surface-emitting laser (VCSEL). The physical mechanism of minimum threshold current generation in oxide-confined VCSEL has been thoroughly studied theoretically and experimentally. Further, we also succeeded in 90.8 mW optical output power, 40% power conversion efficiency with 2 × 4 VCSEL arrays. We find an increase in output power and PCE of 2 × 2 VCSEL arrays as we increase the array spacing which we attribute primarily to increased heat dissipation and reduced thermal crosstalk between the emitters. Thermal properties in oxide-confined 2 × 2 VCSEL arrays were analyzed numerically and experimentally. The simulated results are in good agreement with the measurement. It is proved that theoretical simulation is very useful for the future device optimization.

Densely packed 1.1 μm band vertical cavity surface emitting laser array for co-packaged optics

We demonstrated the 1.1 μm band 16-channel vertical cavity surface emitting laser (VCSEL) array for multi-core fiber (MCF) transmission towards co-packaged optics. Single-mode 16-ch top and bottom emitting VCSEL arrays were fabricated by either 3 inch or 6 inch wafer foundry process. The thermal crosstalk is estimated by wavelength shift. When the distance between adjacent VCSELs is 40 μm, the total thermal crosstalk is as low as 7 K. Bottom emitting metal-aperture VCSEL array were also fabricated via a full 3 inch wafer process. It shows low resistance and good single mode characteristic with an oxidation aperture of 7 μm thanks to an intra-cavity metal aperture. A large mode field diameter of 6 μm enables low coupling loss between bottom VCSEL array and MCF through a GaAs substrate for a flip-chip bonding process.

Photonic neuromorphic computing using vertical cavity semiconductor lasers

Photonic realizations of neural network computing hardware are a promising approach to enable future scalability of neuromorphic computing. The number of special purpose neuromorphic hardware and neuromorphic photonics has accelerated on such a scale that one can now speak of a Cambrian explosion. Work along these lines includes (i) high performance hardware for artificial neurons, (ii) the efficient and scalable implementation of a neural network’s connections, and (iii) strategies to adjust network connections during the learning phase. In this review we provide an overview on vertical-cavity surface-emitting lasers (VCSELs) and how these high-performance electro-optical components either implement or are combined with additional photonic hardware to demonstrate points (i-iii). In the neurmorphic photonics context, VCSELs are of exceptional interest as they are compatible with CMOS fabrication, readily achieve 30% wall-plug efficiency, &gt;30 GHz modulation bandwidth and multiply and accumulate operations at sub-fJ energy. They hence are highly energy efficient and ultra-fast. Crucially, they react nonlinearly to optical injection as well as to electrical modulation, making them highly suitable as all-optical as well as electro-optical photonic neurons. Their optical cavities are wavelength-limited, and standard semiconductor growth and lithography enables non-classical cavity configurations and geometries. This enables excitable VCSELs (i.e. spiking VCSELs) to finely control their temporal and spatial coherence, to unlock terahertz bandwidths through spin-flip effects, and even to leverage cavity quantum electrodynamics to further boost their efficiency. Finally, as VCSEL arrays they are compatible with standard 2D photonic integration, but their emission vertical to the substrate makes them ideally suited for scalable integrated networks leveraging 3D photonic waveguides. Here, we discuss the implementation of spatially as well as temporally multiplexed VCSEL neural networks and reservoirs, computation on the basis of excitable VCSELs as photonic spiking neurons, as well as concepts and advances in the fabrication of VCSELs and microlasers. Finally, we provide an outlook and a roadmap identifying future possibilities and some crucial milestones for the field.

Low Divergence Coherently Coupled Vertical Cavity Surface Emitting Laser Ring Arrays

We report the theory and experimental verification of a method to reduce beam divergence from coherently-coupled ring arrays of photonic crystal vertical cavity surface emitting lasers (VCSELs). The photonic crystal etched into the top distributed Bragg reflector defines the optically coupled array elements, each of which has independent current injection and thus independent gain. Using a 2-dimensional complex waveguide model we simulate the supermodes of a 6-element ring array of VCSELs. The influence of the photonic crystal, free carrier loss, laser gain, and carrier-induced index suppression arising from the spatially defined gain regions are included in our analysis. Our simulations show the latter enables preferred anti-guided supermodes with reduced beam divergence. Optical characterization of the spectral and beam characteristics of 6-ring photonic crystal implanted VCSEL arrays shows that when the arrays are current-tuned to quasi-single mode operation, we find the beam divergence angle approaches 2° consistent with our simulations. This method of reduced beam divergence may have advantages for high-brightness applications.

A 658-W VCSEL-pumped rod laser module with 52.6% optical efficiency

A high-efficiency and high-power vertical-cavity surface-emitting laser (VCSEL) side-pumped rod Nd:YAG laser with temperature adaptability are demonstrated. The VCSEL side-pumped laser module is designed and optimized. Five VCSEL arrays are symmetrically located around the laser rod and a large size diffused reflection chamber is designed to ensure a uniform pump distribution. Furthermore, the absorbed pump power distribution of the rod is simulated to verify the uniformity of the pump absorption. Finally, a proof-of-principle experiment is performed in short linear cavity laser with single laser module. A continuous-wave output power of 658 W at 1064 nm is obtained, the corresponding optical-to-optical efficiency is 52.6%, and the power variations are ±0.7% over 400 s and ±3.1% over the temperature range from 16 °C to 26 °C. To the best of our knowledge, this is the highest output power and the highest optical-to-optical efficiency ever reported for VCSEL pumped solid-state lasers. By inserting a telescopic module into the cavity and optimizing the TEM00 mode volume, the average beam quality is measured to be M 2 = 1.34 under an output power of 102 W. The experimental results reveal that such a high power rod laser module with temperature stability is appropriate for field applications.

High Speed VCSEL Technology and Applications

Historically optical links up to 100–300m distances are served by light emitting devices in the 850 nm spectral range in combination with multimode glass fibers (MMF). As the silicon scaling continues, a single channel data rate is to double each 24 months. Light-emitting diodes had to be replaced by vertical cavity surface emitting lasers (VCSELs) and the data rate increased from 100 Mb/s to 10 Gb/s. At higher data rates problems with further scaling evolved. To avoid the collapse an anti-waveguiding VCSEL cavity design was invented, applied, and presently serves data links operating up to 50–100 Gb/s per channel. Another requirement in data communication is the bandwidth density scaling, with the number of channels per link increasing approximately 5-fold each 10 years, while keeping a similar space for connectors. A coarse short-wavelength division multiplexing allowing 850 nm, 880 nm, 910 nm, and 940 nm wavelengths in a single MMF is introduced. The bandwidth density increase is also possible by using multicore fiber (MCF) coupled to on-chip VCSEL arrays. The data rates up to 224 Gb/s are already reached by 850nm VCSELs. At such data rates significant transmission distance over MMF is only possible by applying ultra-narrow spectrum VCSELs minimizing the chromatic dispersion effects. On-chip mini-arrays of oxide-confined VCSELs allow a high coupling efficiency to MMFs, a narrow spectrum, a high power, a significant transmission distance at high data rates. Coherent lasing in such arrays allow photon-photon resonance engineering aimed at modulation bandwidths ∼50–100 GHz.

Fourier-method beam analysis for coherent vertical cavity surface emitting laser arrays.

Effective engineering and exploitation of coherently coupled vertical cavity surface emitting laser arrays will benefit from simple and fast characterization of the optical coupling and coherence. We propose a Fourier method of analyzing beam profiles as an alternative to the prior beam visibility analysis and show that the mode suppression ratio and phase between a pair of supermodes can be extracted. Our analysis enables fast quantitative determination of the array coherence and supermode characteristics.

A VCSEL Array Transmission System With Novel Beam Activation Mechanisms

Optical wireless communication (OWC) is considered to be a promising technology which will alleviate traffic burden caused by the increasing number of mobile devices. In this study, a novel vertical-cavity surface-emitting laser (VCSEL) array is proposed for indoor OWC systems. To activate the best beam for a mobile user, two beam activation methods are proposed for the system. The method based on a corner-cube retroreflector (CCR) provides very low latency and allows real-time activation for high-speed users. The other method uses the omnidirectional transmitter (ODTx). The ODTx can serve the purpose of uplink transmission and beam activation simultaneously. Moreover, systems with ODTx are very robust to the random orientation of a user equipment (UE). System level analyses are carried out for the proposed VCSEL array system. For a single user scenario, the probability density function (PDF) of the signal-to-noise ratio (SNR) for the central beam of the VCSEL array system can be approximated as a uniform distribution. In addition, the average data rate of the central beam and its upper bound are given analytically and verified by Monte-Carlo simulations. For a multi-user scenario, an analytical upper bound for the average data rate is given. The effects of the cell size and the full width at half maximum (FWHM) angle on the system performance are studied. The results show that the system with a FWHM angle of $4^\circ$ outperforms the others.

High-Brightness, High-Speed, and Low-Noise VCSEL Arrays for Optical Wireless Communication

The development of high-speed and high-brightness vertical-cavity surface-emitting lasers (VCSELs), which can serve as an efficient light source for optical wireless communication (OWC), play a crucial role in growth of the next generation of wireless communication networks, e.g., 6 G and satellite communications. In this work, by optimizing the size of the Zn-diffusion and oxide-relief apertures in a high-speed 850 nm VCSEL, we obtain record-high brightness (2.9 MW <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${\mathrm {cm}}^{-2}{\mathrm {sr}}^{-1}$ </tex-math></inline-formula> at 10 mW output) with single polarized and (quasi-) single-mode (SM) outputs under continuous wave (CW) operation. However, such high brightness output comes at the cost of spatial hole burning (SHB) effect and degraded quality of 25 Gbit/sec eye patterns. In addition, an SM VSCEL array structure is usually needed to further boost the total available optical power for long-reach OWC. Here, a novel (quasi-) SM VCSEL array structure is demonstrated which releases the trade-off between the performances of brightness and eye-pattern quality. Our demonstrated array has a special crisscross mesa connecting neighboring VCSEL units and an extra electroplated copper substrate integrated on the backside of the chip. Compared to the reference array without the copper substrate and connected active mesas, the demonstrated array exhibits a higher (quasi-) SM output power, narrower divergence angle, larger orthogonal polarization mode suppression ratio (OPSR), and flatter E-O response. This in turn leads to smaller jitter and less noise in the measured 12.5 Gbit/sec eye-patterns. The demonstrated <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$7\times 7$ </tex-math></inline-formula> array exhibits a maximum SM power of around 90 mW with a 1/ <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\text{e}^{2}$ </tex-math></inline-formula> divergence angle as narrow as 7 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">o</sup> (FWHM: 5 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">o</sup> ), single polarized output (10 dB OPSR), decent relative intensity noise performance (<−130 dB/Hz) and clear 12.5 Gbit/sec eye-opening. Such new device with remarkable static/dynamic performances has strong potential to further improve the product of the linking distance and data rate in the next generation of OWC channels.

High-Speed and High-Power 940 nm Flip-Chip VCSEL Array for LiDAR Application

In this paper, we demonstrate the design and fabrication of a high-power, high-speed flip-chip vertical cavity surface emitting laser (VCSEL) for light detection and ranging (LiDAR) systems. The optoelectronic characteristics and modulation speeds of vertical and flip-chip VCSELs were investigated numerically and experimentally. The thermal transport properties of the two samples were also numerically investigated. The measured maximum output power, slope efficiency (SE) and power conversion efficiency (PCE) of a fabricated flip-chip VCSEL array operated at room-temperature were 6.2 W, 1.11 W/A and 46.1%, respectively. The measured L-I-V curves demonstrated that the flip-chip architecture offers better thermal characteristics than the conventional vertical structure, especially for high-temperature operation. The rise time of the flip-chip VCSEL array was 218.5 ps, and the architecture of the flip-chip VCSEL with tunnel junction was chosen to accommodate the application of long-range LiDAR. The calculated PCE of such a flip-chip VCSEL was further improved from 51% to 57.8%. The device design concept and forecasting laser characteristics are suitable for LiDAR systems.