This paper presents an equivalent-circuit model of a MEMS phase detector and deals with its application in phase-locked loops (PLLs). Due to the dc voltage output of the MEMS phase detector, the low-pass filter which is essential in a conventional PLL can be omitted. Thus, the layout area can be miniaturized and the consumed power can be saved. The signal transmission inside the phase detector is realized in circuit model by waveguide modules while the electric-thermal-electric conversion is illustrated in circuit term based on analogies between thermal and electrical variables. Losses are taken into consideration in the modeling. Measurement verifications for the phase detector model are conducted at different input powers 11, 14 and 17dBm at 10GHz. The maximum discrepancies between the simulated and measured results are 0.14, 0.42 and 1.13mV, respectively. A new structure of PLL is constructed by connecting the presented model directly to a VCO module in the simulation platform. It allows to model the transient behaviors of the PLL at both locked and out of lock conditions. The VCO output frequency is revealed to be synchronized with the reference frequency within the hold range. All the modeling and simulation are performed in Advanced Design System (ADS) software.
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