Vacancy diffusion and the possibility of pore formation during oxide growth by cation diffusion are investigated. For a parabolic time dependence of the oxide thickness growth, the evolution of the vacancy concentration in the metal is analysed by taking into account the annihilation of vacancies at sinks located at the oxide–metal interface and within the metal. By omitting vacancy absorption at growing vacancy agglomerates, upper estimates of the vacancy supersaturation are calculated, from which the nucleation and growth rates of pores are derived. The nucleation rate strongly decreases with increasing oxidation time and temperature whereas the growth rate increases with increasing temperature. The analysis suggests that the appearance of pores is crucially controlled by the strength of vacancy sinks at the oxide–metal interface and by the presence of impurities lowering the surface energy by impurity segregation to the metal surface of vacancy clusters. Possible flaws of the approach which are related to the assumption of parabolic oxide growth are discussed.