Ultrasonic Transducer Array Research Articles

A high-efficient excitation-detection thermoacoustic imaging probe for breast tumor detection.

Microwave-induced thermoacoustic (TA) imaging (MTAI) is a promising alternative to biomedical imaging due to its high resolution, deep imaging depth, and minimal biohazard. To provide images of different anatomical regions and apply them to different clinical scenarios, the development of miniaturized portable TA probes is imperative. This study is aimed to propose a highly efficient handheld non-reflective microwave-acoustic coaxial TA probe to advance the translation of MTAI for the clinical use. The TA probe integrates a hollowed microwave antenna with a forward radiating uniform microwave field and a linear ultrasonic transducer array which is placed in the hole in the middle of the antenna that has almost no effect on the microwave distribution. The integrated probe was evaluated for properties, including the excitation efficiency of the microwave and the reception efficiency of the acoustic signal. Finally, an isolated EMT6 cell tumor was embedded in a sheep mammary gland to simulate the natural breast tumor environment, and the tumor was detected with the proposed MTAI probe to evaluate its practical feasibility. Compared with the previous TA imaging probe, it has improved the detection efficiency of TA signals by up to 41%, contributing to an improved signal-to-noise ratio (SNR) of the image. The proposed TA probe successfully detected tumors embedded in the breast with a contrast ratio 3.27 times higher than the surrounding tissue in phantom experiments. The proposed TA probe with the features of microwave illumination and ultrasonic detection of coaxial, avoiding TA signal attenuation due to reflection, enables high-efficient TA signal excitation and detection. The proposed TA probe is essential for improving the excitation and detection efficiency of TA signals, and increasing the flexibility of the probe, providing a bright future for the clinical application of MTAI technology.

A photoacoustic patch for three-dimensional imaging of hemoglobin and core temperature

Electronic patches, based on various mechanisms, allow continuous and noninvasive monitoring of biomolecules on the skin surface. However, to date, such devices are unable to sense biomolecules in deep tissues, which have a stronger and faster correlation with the human physiological status than those on the skin surface. Here, we demonstrate a photoacoustic patch for three-dimensional (3D) mapping of hemoglobin in deep tissues. This photoacoustic patch integrates an array of ultrasonic transducers and vertical-cavity surface-emitting laser (VCSEL) diodes on a common soft substrate. The high-power VCSEL diodes can generate laser pulses that penetrate >2 cm into biological tissues and activate hemoglobin molecules to generate acoustic waves, which can be collected by the transducers for 3D imaging of the hemoglobin with a high spatial resolution. Additionally, the photoacoustic signal amplitude and temperature have a linear relationship, which allows 3D mapping of core temperatures with high accuracy and fast response. With access to biomolecules in deep tissues, this technology adds unprecedented capabilities to wearable electronics and thus holds significant implications for various applications in both basic research and clinical practice.

Thin ceramic PZT dual- and multi-frequency pMUT arrays for photoacoustic imaging

Miniaturized ultrasonic transducer arrays with multiple frequencies are key components in endoscopic photoacoustic imaging (PAI) systems to achieve high spatial resolution and large imaging depth for biomedical applications. In this article, we report on the development of ceramic thin-film PZT-based dual- and multi-frequency piezoelectric micromachined ultrasonic transducer (pMUT) arrays and the demonstration of their PAI applications. With chips sized 3.5 mm in length or 10 mm in diameter, square and ring-shaped pMUT arrays incorporating as many as 2520 pMUT elements and multiple frequencies ranging from 1 MHz to 8 MHz were developed for endoscopic PAI applications. Thin ceramic PZT with a thickness of 9 μm was obtained by wafer bonding and chemical mechanical polishing (CMP) techniques and employed as the piezoelectric layer of the pMUT arrays, whose piezoelectric constant d31 was measured to be as high as 140 pm/V. Benefiting from this high piezoelectric constant, the fabricated pMUT arrays exhibited high electromechanical coupling coefficients and large vibration displacements. In addition to electrical, mechanical, and acoustic characterization, PAI experiments with pencil leads embedded into an agar phantom were conducted with the fabricated dual- and multi-frequency pMUT arrays. Photoacoustic signals were successfully detected by pMUT elements with different frequencies and used to reconstruct single and fused photoacoustic images, which clearly demonstrated the advantages of using dual- and multi-frequency pMUT arrays to provide comprehensive photoacoustic images with high spatial resolution and large signal-to-noise ratio simultaneously.

Development of MEMS Airflow Volumetric Flow Sensing System with Single Piezoelectric Micromachined Ultrasonic Transducer (PMUT) Array

Compared to conventional ultrasonic flowmeters using multiple transducers, this paper reports, for the first time, an airflow volumetric flowmeter using a signal PMUT array to measure the flow rate in a rectangular pipe. The PMUT around 200 kHz is selected to fit the system requirements. All PMUT elements on this single array are then electrically grouped into transmitter and receiver. In order to minimize the crosstalk signal between transmitter and receiver, a phase shift signal is applied at the transmitter to reduce the amplitude of the crosstalk signal by 87.8%, hence, the resultant high sensing resolution. Based on the analog signal extracted from the single PMUT array, a complete flow sensing system is built by using the cross-correlation method and cosine interpolation, whereby the change in flow rate is reflected by the time of flight difference (dTof) recorded at the receiver. Meanwhile, the acoustic path self-calibration is realized by using multiple echoes. Compared with the previously reported MEMS flowmeters with dual or multiple PMUT devices, this paper proposes a single PMUT array flow sensing system, which is able to measure the flow rate changes up to 4 m3/h. With the implementation of a single device, the problem of ultrasound device/reflector misalignment during system setup is completely eradicated.

Integrated Hybrid Sub-Aperture Beamforming and Time-Division Multiplexing for Massive Readout in Ultrasound Imaging.

This paper demonstrates hybrid sub-aperture beamforming (SAB) with time-division multiplexing (TDM) for massive interconnect reduction in ultrasound imaging systems. A single-chip front-end system prototype has been fabricated in 180-nm HV BCD technology that combines 5×1 SAB with 8×1 TDM to efficiently reduce the number of receive signal interconnects by a factor of 40. The system includes on-chip high-voltage (HV) pulsers capable of generating unipolar pulses up to 70 V in transmit (TX) mode. The receiver (RX) chain consists of a T/R switch, a variable-gain low-noise amplifier (VG-LNA) with 4-step gain control (15-32 dB) for time-gain compensation followed by a programmable switched-capacitor analog delay-and-sum beamformer. The proof-of-concept prototype operates at a 200-MHz clock frequency and the SAB provides 32-step fine delays with a maximum delay of 310 ns corresponding to better than λ/20 delay quantization at 5 MHz. With these specifications, the SAB is capable of beam steering from 0 ° to 45 ° for a 5-element subarray with 150-micron pitch ( λ/2), providing a near-ideal phased array imaging performance. The sub-aperture beamformer is followed by the TDM system where each of the 8 channels is sampled at a rate of 25 MS/s after an anti-aliasing bandpass filter. The full functionality of the prototype chip is validated through electrical and acoustic measurements on a 1-D capacitive micromachined ultrasonic transducer (CMUT) array designed for intracardiac echocardiography (ICE).

PREFACE: A SPECIAL SELECTION ON EMERGING TECHNIQUES FOR BIOMECHANICS–PART II

PREFACE: A SPECIAL SELECTION ON EMERGING TECHNIQUES FOR BIOMECHANICS–PART II

Development of a 16-Channel Broadband Piezoelectric Micro Ultrasonic Transducer Array Probe for Pipeline Butt-Welded Defect Detection.

Butt welding is extensively applied in long-distance oil and gas pipelines, and it is of great significance to conduct non-destructive ultrasonic testing of girth welds in order to avoid leakage and safety accidents during pipeline production and operation. In view of the limitations of large transducer size, single fixed beam angle, low detection resolution and high cost of conventional ultrasonic inspection technologies, a 16-channel piezoelectric micro ultrasonic transducer (PMUT) array probe was developed through theoretical analysis and structural optimization design. After the probe impedance characterization, the experimental results show that the theoretical model can effectively guide the design of the ultrasonic transducer array, offering the maximum operating frequency deviation of less than 5%. The ultrasonic echo performance tests indicate that the average −6 dB bandwidth of the PMUT array probe can be up to 77.9%. In addition, the fabricated PMUT array probe has been used to successfully detect five common internal defects in pipeline girth welds. Due to the multiple micro array elements, flexible handling of each element, large bandwidth and high resolution of defect detection, the designed PMUT array probe can provide a good application potential in structural health monitoring and medical ultrasound imaging fields.

High-Speed Inspection of Rails by Passive Ultrasonic Monitoring

Abstract This paper presents a high-speed noncontact rail inspection technique that has the potential of detecting internal rail defects at regular (revenue) train speeds. The technique utilizes an array of capacitive air-coupled ultrasonic transducers in continuous recording mode to extract a reconstructed transfer function for a rail segment in a passive manner. The passive approach utilizes the ambient excitation of the rail induced by the wheels of the test car and eliminates the need for a controlled source. A normalized cross-correlation operator with modified Welch's periodogram technique is used to extract the transfer function in a manner that is independent of the uncontrolled excitation source (rolling wheels). Discontinuities in the rail (e.g., joints, welds, and defects) alter the reconstructed transfer function which is statistically tracked using an outlier analysis for detection robustness and sensitivity. Field tests were carried out with a prototype at the Transportation Technology Center Inc. (TTCI) in Pueblo, CO at testing speeds of up to 80 mph. The performance of the system in detecting rail discontinuities was assessed via receiver operating characteristic curves for a range of varying operational parameters such as excitation strength, baseline distribution length, testing speed, and multiple runs.

Modelling and characterisation ultrasonic phased array transducers for pipe inspections

Nuclear pipes require regular inspection to prevent critical damage and extend their safe working lifetime. Ultrasonic inspection using phased array transducers is a Non-Destructive Testing (NDT) method used to monitor the condition of pipes, providing internal integrity information using multiple small transducer elements. This grants a controllable ultrasonic beam that provides more detail than a conventional single element transducer. This paper presents a hybrid simulation model to characterise phased array ultrasonic transducers for pressure pipe inspections. The paper focuses on identifying defects on pipe surfaces, which have total propagation path lengths in the order of 170 ultrasound wavelengths. Simulating inspections with such large path lengths is challenging due to unreliable results from numerical dispersion errors in large finite element models. The model presented here combines the benefits of finite element modelling with analytical extrapolation to overcome the issue of large propagation distances. A practical experiment demonstrates and verifies that the hybrid simulation model matches real world inspections. Inspection accuracy was quantified using the hybrid simulation model over frequency (5, 7.5 and 10 MHz) and number of elements (8, 16 and 32) to inspect two defect shapes (rectangular and V-shape). The 10 MHz transducer showed the highest resolution for the depth measurement, while the 5 MHz transducer presented the strongest penetration to inspect the defects on the pipe's outer surface. The largest aperture transducer, 32 elements, brought about the most accurate defect size measurement. This work serves to inexpensively guide the selection and later deployment of phased array inspection tools in nuclear pipe defect detection and monitoring.

An Adaptive Element-Level Impedance-Matched ASIC With Improved Acoustic Reflectivity for Medical Ultrasound Imaging.

This paper presents an active impedance matching scheme that tries to optimize electrical power transfer and acoustic reflectivity in ultrasound transducers. Leveraging negative capacitance-based impedance matching would potentially improve the bandwidth and electrical power transfer while minimizing acoustic reflection of transducer elements and improve uniformity while reducing acoustic crosstalk of transducer arrays. A 16-element transceiver front-end is designed which employs an element-level active capacitive impedance cancellation scheme using an element-level negative impedance converter. The ASIC fabricated in 180-nm HVBCD technology provides high-voltage pulses up to 60 V consuming 3.6 mW and occupying 2.5 mm2. The front-end ASIC is used with a 1-D capacitive micromachined ultrasonic transducer (CMUT) array and its acoustical reflectivity reduction and imaging capabilities have successfully been demonstrated through pulse-echo measurements and acoustic imaging experiments.

Cross‐Ray Ultrasound Tomography and Photoacoustic Tomography of Cerebral Hemodynamics in Rodents

Recent advances in functional ultrasound imaging (fUS) and photoacoustic tomography (PAT) offer powerful tools for studying brain function. Complementing each other, fUS and PAT, respectively, measure the cerebral blood flow (CBF) and hemoglobin concentrations, allowing synergistic characterization of cerebral hemodynamics. Here, cross‐ray ultrasound tomography (CRUST) and its combination with PAT are presented. CRUST employs a virtual point source from a spherically focused ultrasonic transducer (SFUST) to provide widefield excitation at a 4‐kHz pulse repetition frequency. A full‐ring‐shaped ultrasonic transducer array whose imaging plane is orthogonal to the SFUST's acoustic axis receives scattered ultrasonic waves. Superior to conventional fUS, whose sensitivity to blood flow is angle‐dependent and low for perpendicular flow, the crossed transmission and panoramic detection fields of CRUST provide omnidirectional sensitivity to CBF. Using CRUST‐PAT, the CBF, oxygen saturation, and hemoglobin concentration changes of the mouse brain during sensory stimulation are measured, with a field of view of ≈7 mm in diameter, spatial resolution of ≈170 µm, and temporal resolution of 200 Hz. The results demonstrate CRUST‐PAT as a unique tool for studying cerebral hemodynamics.

Effects and mechanism of ultrasound treatment on Chironomus kiiensis eggs.

Chironomids are abundant insects in freshwater ecosystems and lay in still or slow-moving water. The walls of sedimentation tanks in drinking water treatment plants (DWTP) provide such laying habitat, which can lead to larval outbreaks in plant effluent. While chironomid larvae are often associated with poor hygiene, effective methods to control outbreaks are needed. Here, we assessed the effect of ultrasound treatment on Chironomus kiiensis' eggs. The mortality rate of eggs was examined after ultrasound treatment, and the protein content (heat shock protein 70 and hemoglobin) and enzymatic activities of acetylcholinesterase, cytochrome P450, and glutathione S-transferases involved in the ultrasound-induced stress response were analyzed before and after treatment. COMSOL software was also used to examine the characteristics of the ultrasonic field, including frequency, power, exposure distance, and time. Higher egg mortality was observed at lower frequencies. At 28kHz, 450W, 15-mm exposure distance, and 75-s exposure time, 72.4% of eggs showed apoptosis after exposure. At higher frequencies (68kHz), mortality decreased to 50.9%. Exposure time and distance also significantly affected egg mortality. From the geometric models, it could be seen that C. kiiensis' eggs sustained much greater acoustic pressure (2379Pa) with 28-kHz exposure than that with 68-kHz exposure (422Pa); however, the propagation distance was greater at the higher frequency. The hydraulic shear force effect of the ultrasonic radiation appeared to be the primary factor in egg mortality. We expected that array of ultrasonic transducers embedded in the walls of water treatment plants could be effective in killing Chironomus' eggs and highlight the potential for ultrasound as an effective treatment for the prevention of Chironomus outbreaks in treatment plant effluents.

A Handheld Imaging Probe for Acoustic Angiography With an Ultrawideband Capacitive Micromachined Ultrasonic Transducer (CMUT) Array.

This article presents an imaging probe with a 256-element ultrawideband (UWB) 1-D capacitive micromachined ultrasonic transducer (CMUT) array designed for acoustic angiography (AA). This array was fabricated on a borosilicate glass wafer with a reduced bottom electrode and an additional central plate mass to achieve the broad bandwidth. A custom 256-channel handheld probe was designed and implemented with integrated low-noise amplifiers and supporting power circuitry. This probe was used to characterize the UWB CMUT, which has a functional 3-dB frequency band from 3.5 to 23.5 MHz. A mechanical index (MI) of 0.33 was achieved at 3.5 MHz at a depth of 11 mm. These promising measurements are then combined to demonstrate AA. The use of alternate amplitude modulation (aAM) combined with a frequency analysis of the measured transmit signal demonstrates the suitability of the UWB CMUT for AA. This is achieved by measuring only a low level of unwanted high-frequency harmonics in both the transmit signal and the reconstructed image in the areas other than the contrast bubbles.

Mapping Mid-Air Haptics With a Low-Cost Tactile Robot

Mid-air haptics create a new mode of feedback to allow people to feel tactile sensations in the air. Ultrasonic arrays focus acoustic radiation pressure in space, to induce tactile sensation from the resulting skin deflection. In this work, we present a low-cost tactile robot to test mid-air haptics. By combining a desktop robot arm with a 3D-printed biomimetic tactile sensor, we developed a system that can sense, map, and visualize mid-air haptic sensations created by an ultrasonic transducer array. We evaluate our tactile robot by testing it on a variety of mid-air haptic stimuli, including unmodulated and modulated focal points that create a range of haptic shapes. We compare the mapping of the stimuli to another method used to test mid-air haptics: Laser Doppler Vibrometry, highlighting the advantages of the tactile robot including far lower cost, a small lightweight form-factor, and ease-of-use. Overall, these findings indicate our method has multiple benefits for sensing mid-air haptics and opens up new possibilities for expanding the testing to better emulate human haptic perception.

Improved mid-air acoustic tweezers using adaptive phase and amplitude control

Recently, remarkable developments in contact-less manipulation methods using ultrasonic transducer arrays have been reported. Ultrasonic non-contact manipulation enables precise control of small objects without contamination; therefore, it is expected to have a wide range of applications. In this paper, we present a novel approach for the stable non-contact pick-up of small particles from a rigid stage using a hemispherical ultrasonic transducer array. We achieved stable pick-up by employing adaptive phase and amplitude control against the distance from the reflection stage.

A novel non-destructive testing method for turbine disks using dual array ultrasonic transducer.

A novel dual array inspection method for detecting the diffusion bonding defects of superalloy turbine disk has been proposed in this study. The influence of relative position between the planar defect and acoustic source has been analysed, and based on which, the transmission and reception algorithm for the dual array method has been proposed. The time delay law of the dual array transducer for the complex turbine disk structure has been investigated. Finite-difference time-domain theory has been used to establish the numerical model of the dual array method. In the numerical simulations, the novel method has been applied for the superalloy turbine disk specimen with prefabricated defects at the depth of 18.3 m and 28.3 mm. Furthermore, the corresponding experiment has been conducted and verifies the reliability of the simulation. The novel method shows advantages in detecting small diffusion bonding defects in complex structure, assisting the manufacture of superalloy turbine disks, and ensuring the safety of aircrafts.

Fabrication and characterization of row-column addressed pMUT array with monocrystalline PZT thin film toward creating ultrasonic imager

In this study, we fabricated a row-column addressed 2-dimensional piezoelectric micromachined ultrasonic transducer (pMUT) array based on the monocrystalline Pb(Zr, Ti)O3 (Mono PZT)-based thin film, and demonstrated its application as the ultrasound imager. At first, we optimized the island-shaped design as an individual element, and then developed the fabrication process based on the control of the edge shape of an insulative polymer pattern. As a result, the hexagonally arranged arrays with 372 elements at the maximum were fabricated successfully, of which the diameter and pitch were 70 µm and 120 µm, respectively. The resonance frequency, displacement sensitivity, and quality factor in air measured approximately 5.4 MHz, 175 nm/V and 175, respectively. This array exhibited low crosstalk. The actuation of the unaddressed element was less than 10 % of that of the addressed one. In addition, the deviations on the resonance frequencies and displacement sensitivities were as small as only 2 % and 15 %, respectively. Then, the basic acoustic performance in a medium FC-70 was evaluated by using the minimum unit array composed of 5 columns. Also, the transmitting beamforming of a focused ultrasonic burst wave was done by applying driving voltages with a time delay. Finally, an ultrasonic imaging for a metallic object was demonstrated by mechanically scanning the object.

Acoustic levitation of multi-wavelength spherical bodies using transducer arrays of non-specialized geometries.

Recently, acoustic levitation of a wavelength-sized spherical object using a general-purpose ultrasonic transducer array was demonstrated. In this article, the possibility of extending the capabilities of such arrays to levitate multi-wavelength-sized objects is explored. The driving signals for the elements in the array are determined via numerical optimization of a physics-based cost function that includes components for trap stabilization. The cost function is balanced with an improved approach, mimicking dynamical de-weighting of the included components to avoid over-optimization of each individual component. Sound fields are designed and analyzed for levitation of objects with diameters up to 50 mm for various general-purpose simulated array configurations. For a 16 × 16 element transducer array, simulations predict levitation of spheres with diameters up to 20 mm (2.3 wavelengths), which is verified experimentally.

A Prototype System With Custom-Designed RX ICs for Contrast-Enhanced Ultrasound Imaging

This work presents a prototype system based on a multichannel receiving (RX) integrated circuit (IC) for contrast-enhanced ultrasound (CEUS) imaging. The RX IC is implemented in a 40-nm low-voltage CMOS technology and is designed to interface to a capacitive micromachined ultrasonic transducer array. To enable a direct connection of the RX electronics to the transducer, an analog multiplexer with on-chip protection circuitry is developed. Stress tests confirm the reliability of this arrangement when combined with a high-voltage pulser. The RX IC is equipped with a highly programmable bandpass filter to capture harmonic signals from ultrasound contrast agents (UCAs) while suppressing fundamental components. In order to examine the impact of analog front-end (AFE) bandpass filtering, in vitro acoustic experiments are performed with UCAs. A spatial resolution analysis suggests that the AFE bandpass filtering combined with a pulse inversion (PI) technique can improve the lateral resolution by 38% or 9% compared to the original full-bandwidth approach or a stand-alone PI approach, respectively, while the impact on axial resolution is negligible. A phantom study shows that compared to digital bandpass filtering, the AFE bandpass filtering enables better use of the dynamic range of the RX electronics, resulting in better generalized contrast-to-noise ratio from 0.44/0.53 to 0.57/0.68 without or with PI.

Application of Phased Array Ultrasonic Transducers for Guided Wave Scanning of Plates Using Multi-point Focusing Technique

Application of Phased Array Ultrasonic Transducers for Guided Wave Scanning of Plates Using Multi-point Focusing Technique