Abstract
Recently, remarkable developments in contact-less manipulation methods using ultrasonic transducer arrays have been reported. Ultrasonic non-contact manipulation enables precise control of small objects without contamination; therefore, it is expected to have a wide range of applications. In this paper, we present a novel approach for the stable non-contact pick-up of small particles from a rigid stage using a hemispherical ultrasonic transducer array. We achieved stable pick-up by employing adaptive phase and amplitude control against the distance from the reflection stage.
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