Abstract Recently Moth-Eye nanostructure is widely used in solar cell light harvesting enhancement, in this computational work, three different designs; rectangular, triangular, and semi-circular structures were introduced as anti-reflect structures placed above a silicon solar cell, anti-reflected nanostructured modeled and optimized for silicon ultra-thin film solar cells using the finite difference time domain method for optical, and Lumerical devise software for electrical properties study. The effect of the geometrical dimension of the three structures was investigated. It is found that light-harvesting and solar cell performance can be enhanced by choosing a suitable structure and dimension for the suggested structure. The optimum efficiency enhancement achieved was by a semi-circular structure with a radius of 200nm from 8.81% to 11.95%.