Two-port Surface Acoustic Wave Resonator Research Articles

Dual resonance modes in two-port SAW resonator sensors: an analysis through scattering matrix approach

We report dual resonance modes occurring in two-port surface acoustic wave (SAW) resonators attached with typical sensing film and investigated the significance in sensing applications. Two-port SAW resonators operating at 303 MHz frequency were modelled using the scattering matrix approach and resonance frequency characteristics of the resonators were studied for mass loading caused by an arbitrary film attached between the interdigital transducers of the resonator. Depending on the mass loading, symmetric and antisymmetric modes occur around the near resonance frequency of the SAW device. Either a single-mode or both modes are dominant depending on the phase shift caused by the mass loading of the film. Choosing arbitrary film thickness could result in complexity to track the resonance frequency shift and degrade sensing performance. The approach used for analysis can aid to determine the optimum sensing film thickness for two port SAW resonator-based sensors that can exhibit better linearity.

Measuring Velocity, Attenuation, and Reflection in Surface Acoustic Wave Cavities Through Acoustic Fabry-Pérot Spectra.

Surface acoustic wave (SAW) cavities have been widely applied as electronic bandpass filters, sensors, microfluidic tweezers, and, in recent years, as devices for coupling with quantum systems. Here we propose a novel method of analyzing acoustic Fabry-Pérot spectra, by analogy with optical cavities, to determine the free surface velocity and attenuation of SAW waves, as well as the reflection of interdigital transducers (IDTs), all of which are crucial design parameters. In our experiment, two-port SAW resonators, consisting of two IDTs laterally separated by a free surface cavity length, are used to generate SAWs on 128° Y-X lithium niobate that are trapped between the two IDTs which also act as Bragg reflectors. Resonant cavity peaks can be observed through the electrical S11 (reflection) spectrum measured on one IDT. The free spectral range and linewidths of cavity peaks are then measured to obtain the free surface SAW velocity, SAW propagation attenuation coefficient, and IDT reflection phase and amplitude. Our method of analyzing Fabry-Pérot spectra provides an intuitive approach for determining key characteristics of SAW waves and cavities.

Modelling and Simulation using Finite Element Method of Surface Acoustic Wave Biosensor for Gas Detection Application

A surface acoustic wave (SAW) sensor detects changes in physical properties such as mass and density on its surface. Compared to other types of sensors, SAW sensor have a good stability, high selectivity and sensitivity, fast response, and low-cost. On the other hand, to design and optimize a SAW biosensor requires a long process including time and cost using conventional methods. Therefore, numerical simulation and computational modelling are useful and efficiently conduct analysis for the SAW biosensor. In this paper, a numerical simulation technique is used to analyse the SAW device sensitivity for the application of gas detection. The SAW biosensor can detect very small mass loading by changing its sensor resonance frequency. The two-dimensional (2D) device model is based on a two-port SAW resonator with a gas sensing layer. We made two design of SAW biosensor device with frequency of 872 MHz and 1.74 GHz. A gas with vary concentration from 1 to 100 ppm were used to determine the change of the device resonance frequency. As a result, the high frequency (1.74 GHz) device, shows that the resonance frequency is shifted larger than to the low frequency (872 MHz) device. In addition, the high frequency device offers five times more sensitivity than the low frequency device. By changing the sensor design, the sensor characteristics such as sensitivity can be altered to meet certain sensing requirements. Numerical simulation provides advantages for sensor optimization and useful for nearly representing the real condition.

Ultraviolet sensor with fast response characteristics based on an AgNW/ZnO bi-layer

We demonstrate an ultraviolet (UV) sensor with fast response characteristics based on an AgNW/ZnO bi-layer. This UV sensor is a surface acoustic wave (SAW)-based sensor fabricated using a 128°YX black lithium niobate substrate, which is a piezoelectric in nature. This sensor, which is a two-port SAW resonator, was manufactured by fabricating interdigitated electrodes with a wavelength of 16.4 μm and depositing UV sensing layers such as ZnO, Sn/ZnO, and AgNW/ZnO. Among these sensing layers, the frequency response characteristics were found to be improved in the bi-layer structure. In addition, the AgNW/ZnO-based sensor showed a significant improvement in response and recovery times. These results contributed to rapid oxygen adsorption on the ZnO surface due to the large oxygen contact area that can attributed to the AgNW’s 3D mesh structure and the compensation of the internal electron trap center due to the contact of the metal-semiconductor. The proposed sensor with the metal-semiconductor bi-layer structure based on AgNW nanomaterials showed the fastest response characteristics compared to previous SAW UV sensors.

Enhanced performance of AlN SAW devices with wave propagation along the 〈11−20〉 direction on c-plane sapphire substrate

This paper investigates the effect of acoustic wave propagation direction along the a-direction (〈11−20〉) and m-direction (〈1−100〉) on the frequency responses of c-plane AlN based surface acoustic wave (SAW) devices systematically. The experimental results indicate that the resonant frequency (), quality factor (Q), electromechanical coupling coefficient (), insertion loss and out-of-band rejection can be improved for the a-direction compared with the m-direction of an AlN based SAW resonator on sapphire. The Q is 1347 for a one-port SAW resonator along the a-direction, and the minimum insertion loss is 8.71 dB for a two-port SAW resonator along the a-direction. The insertion loss is 3.23 dB lower for the a-direction compared to the m-direction of the AlN film, which may be attributed to the larger acoustic power flow density. The is 45% higher for the a-direction compared to the m-direction of the AlN film, which may be attributed to the larger elastic constant. In addition, our finite element model simulation results reveal the C11 and C44 for the m-direction are 345 GPa and 102 GPa, while C11 and C44 for the a-direction is increased to 429 GPa and 128 GPa, respectively. Our work demonstrates that the a-direction is better than the m-direction of the AlN film for high performance SAW device applications.

Enhancing the sensitivity of three-axis detectable surface acoustic wave gyroscope by using a floating thin piezoelectric membrane

A new type of surface acoustic wave (SAW) gyroscope was developed on a floating thin piezoelectric membrane to enhance sensitivity and reliability by removing a bulk noise effect and by importing a higher amplitude of SAW. The developed device constitutes a two-port SAW resonator with a metallic dot array between two interdigital transducers (IDTs), and a one-port SAW delay line. The bulk silicon was completely etched away, leaving only a thin piezoelectric membrane with a thickness of one wavelength. A voltage controlled oscillator (VCO) was connected to a SAW resonator to activate the SAW resonator, while the SAW delay line was connected to the oscilloscope to monitor any variations caused by the Coriolis force. When the device was rotated, a secondary wave was generated, changing the amplitude of the SAW delay line. The highest sensitivity was observed in a device with a full acoustic wavelength thickness of the membrane because most of the acoustic field is confined within an acoustic wavelength thickness from the top surface; moreover, the thin-membrane-based gyroscope eliminates the bulk noise effect flowing along the bulk substrate. The obtained sensitivity and linearity of the SAW gyroscope were ∼27.5 µV deg−1 s−1 and ∼4.3%, respectively. Superior directivity was observed. The device surface was vacuum-sealed using poly(dimethylsiloxane) (PDMS) bonding to eliminate environmental interference. A three-axis detectable gyroscope was also implemented by placing three gyrosensors with the same configuration at right angles to each other on a printed circuit board.

Performance comparison of Rayleigh and STW modes on quartz crystal for strain sensor application

In this study, we compare two kinds of strain sensors based on Rayleigh wave and surface transverse wave (STW) modes, respectively. First, we perform a strain-and-stress analysis using the finite element method, and we consider the contribution to a surface acoustic wave (SAW) velocity shift. Prior to fabrication, we use a coupling-of-modes model to simulate and optimize two-port SAW resonators for both modes. We use a network analyzer to measure and characterize the two devices. Further, we perform an experiment using a strain-testing system with a tapered cross-section cantilever beam. The experimental results show that the ratio of the frequency shift to the strain for the Rayleigh wave mode is −1.124 ppm/με in the parallel direction and 0.109 ppm/με in the perpendicular direction, while the corresponding values for the STW mode are 0.680 ppm/με and 0.189 ppm/με, respectively.

Development of a Room Temperature SAW Methane Gas Sensor Incorporating a Supramolecular Cryptophane A Coating.

A new room temperature supra-molecular cryptophane A (CrypA)-coated surface acoustic wave (SAW) sensor for sensing methane gas is presented. The sensor is composed of differential resonator-oscillators, a supra-molecular CrypA coated along the acoustic propagation path, and a frequency signal acquisition module (FSAM). A two-port SAW resonator configuration with low insertion loss, single resonation mode, and high quality factor was designed on a temperature-compensated ST-X quartz substrate, and as the feedback of the differntial oscillators. Prior to development, the coupling of modes (COM) simulation was conducted to predict the device performance. The supramolecular CrypA was synthesized from vanillyl alcohol using a double trimerisation method and deposited onto the SAW propagation path of the sensing resonators via different film deposition methods. Experiential results indicate the CrypA-coated sensor made using a dropping method exhibits higher sensor response compared to the unit prepared by the spinning approach because of the obviously larger surface roughness. Fast response and excellent repeatability were observed in gas sensing experiments, and the estimated detection limit and measured sensitivity are ~0.05% and ~204 Hz/%, respectively.

Surface acoustic wave acceleration sensor with high sensitivity incorporating ST-X quartz cantilever beam

The implementation and performance of a surface acoustic wave (SAW)-based acceleration sensor is described. The sensor was composed of a flexible ST-X quartz cantilever beam with a relatively substantial proof mass at the undamped end, a pattern of a two-port SAW resonator deposited directly on the surface of the beam adjacent to the clamped end for maximum strain sensitivity and a SAW resonator affixed on the metal package base for temperature compensation. The acceleration was directed to the proof mass flex of the cantilever, inducing relative changes in the acoustic propagation characteristics of the SAW traveling along the beams. The frequency signal from the differential oscillation structure utilizing the SAW resonators as the feedback element varies as a function of acceleration. The sensor response mechanism was analyzed theoretically, with the aim of determining the optimized dimension of the cantilever beam. The coupling of modes (COM) model was used to simulate the synchronous SAW resonator prior to fabrication. The oscillator frequency stability was improved using the phase modulation approach; the obtained typical short-term frequency stability ranged up to 1 Hz s−1. The performance of the developed acceleration sensor was evaluated using the precise vibration table and was also evaluated in comparison to the theoretical calculation. A high frequency sensitivity of 29.7 kHz g−1, good linearity and a lower detection limit (∼1 × 10−4 g) were achieved in the measured results.

SAW Sensor for Mercury Vapour Detection

Mercury is the element commonly applied in industry. Because of poisoning properties the monitoring of the mercury vapour concentration in the environment is very important. Mercury forms amalgams in connection with gold that causes a change in the electrical resistance and mass of the gold specimens. This e ect was applied to measure mercury vapour concentration in the environment using surface acoustic wave technology. Two kinds of surface acoustic wave mercury sensors have been described in the paper. First one utilizes a thin lm of gold deposited between aluminium interdigital transducers and re ectors of two-port surface acoustic wave resonator, and the second one golden interdigital transducers and re ectors without any sensitive lm between them.

Characteristics of SAW UV sensors based on a ZnO/Si structure using third harmonic mode

This paper describes the characteristics of surface acoustic wave (SAW) ultraviolet (UV) sensors fabricated from a ZnO thin film using the third harmonic mode. A ZnO thin film was used as an active layer for UV detection, and a piezoelectric layer was sputtered using magnetron sputtering. The X-ray diffraction (XRD) and photoluminescence (PL) spectra showed that the ZnO sputtered onto Si(100) was highly (002)-oriented and had good optical properties. The two-port SAW resonator was based on an inter-digital transducer (IDT)/ZnO/Si structure and was fabricated and exposed under UV light at a wavelength of 380 nm. As a result, under a UV intensity of 3 mW/cm 2, the SAW UV sensor was greatly shifted by 400 kHz at the third harmonic mode compared to a frequency shift of 10 kHz in the fundamental mode.

The effect of geometry and post-annealing on surface acoustic wave characteristics of AlN thin films prepared by magnetron sputtering

This paper describes experimental relationship between surface acoustic wave (SAW) properties of two-port SAW resonators based on polycrystalline aluminum nitride (AlN) thin films grown on Si substrates by using a pulsed reactive magnetron sputtering system and their geometry's parameters. Moreover, the influence of post-deposition heat treatment on SAW properties of AlN thin films was investigated at different annealing temperature (600 °C and 900 °C). The measurement results show the number of the inter-digital transducers (IDT) finger pairs ( N), the number of reflectors grating pairs ( R) and the IDT center-to-center distance ( L) related to insertion loss of SAW resonators. The best result of insertion loss was 15.6 dB for SAW resonators with R = 160 pair, N = 5 pair and L = 750 μm. At the same geometry parameters, the SAW velocity and insertion loss were improved slightly after annealing at 600 °C and were worse for the films annealed at 900 °C by changes in the surface morphology and stress on the film.

Surface acoustic wave characteristics of ZnO films grown on a polycrystalline 3C-SiC buffer layer

Zinc oxide (ZnO) thin films were deposited onto a polycrystalline (poly) 3C-SiC buffer layer for surface acoustic wave (SAW) applications using a magnetron sputtering system. Atomic force microscopy (AFM) and X-ray diffraction (XRD) showed that the ZnO grown on 3C-SiC/Si had a smooth surface, a dominant c-axis orientation and a lower residual stress in ZnO thin film compared to that grown directly onto Si substrate. In order to evaluate the SAW characteristics of ZnO films on a 3C-SiC buffer layer, the two-port SAW resonators, based on inter-digital transducer (IDT)/ZnO/3C-SiC/Si and IDT/ZnO/Si structures, were fabricated and measured within a temperature range of 25–135 °C. The resulting 3C-SiC buffer layer improved the insertion loss by approximately 7.3 dB within the SAW resonator and enhanced the temperature stability with TCF = −22 ppm/°C up to 135 °C in comparison to that of TCF = −45 ppm/°C within a temperature range of 25–115 °C of the ZnO/Si structure.

Enhanced Sensitivity of a Surface Acoustic Wave Gyroscope

In this paper, we present an optimal design and performance evaluation of a surface acoustic wave (SAW) gyroscope. It consists of a two-port SAW resonator (SAWR) and a SAW sensor (SAWS) structured using a delay line pattern. The SAW resonator provides a stable reference vibration and creates a standing wave, and the vibrating metallic dot array at antinodes of the standing wave induces the second SAW in the normal direction by the Coriolis force, and the SAW sensor is used to detect the secondary SAW. By using the coupling of modes (COM), the SAW resonator was simulated, and the effects of the design parameters on the frequency response of the device were investigated. Also, a theoretical analysis was performed to investigate the effect of metallic dots on the frequency response of the SAW device. The measured frequency response S21 of the fabricated 80 MHz two-port SAW resonator agrees well with the simulated result, that is, a low insertion loss (∼5 dB) and a single steep resonance peak were observed. In the gyroscopic experiments using a rate table, optimal metallic dot thickness was determined, and the sensitivity of the fabricated SAW gyroscope with an optimal metallic dot thickness of ∼350 nm was determined to be 3.2 µV deg-1 s-1.

Enhanced Sensitivity of Novel Surface Acoustic Wave Microelectromechanical System-Interdigital Transducer Gyroscope

In this paper, we present a novel microelectromechanical system-interdigital transducer (MEMS-IDT) surface acoustic wave (SAW) gyroscope with an 80 MHz central frequency on a 128° YX LiNbO3 wafer. The developed MEMS-IDT gyroscope is composed of a two-port SAW resonator, a dual delay line oscillator, and metallic dots. The SAW resonator provides a stable standing wave, and the vibrating metallic dot at an antinode of the standing wave induces the second SAW in the normal direction of its vibrating axis. The dual delay line oscillator detects the Coriolis force by comparing the resonant frequencies between two oscillators through the interference effect. The coupling of mode (COM) modeling was used to extract the optimal design parameters prior to fabrication. In the electrical testing by the network analyzer, the fabricated SAW resonator and delay lines showed low insertion loss and similar operation frequencies between a resonator and delay lines. When the device was rotated, the resonant frequency differences between two oscillators linearly varied owing to the Coriolis force. The obtained sensitivity was approximately 119 Hz deg-1 s-1 in the angular rate range of 0–1000 deg/s. Satisfactory linearity and superior directivity were also observed in the test.

A New High-Frequency Surface Acoustic Wave Sensor for Humidity Measurement

The relative humidity sensor based on the high-frequency surface acoustic wave (SAW) resonator has been presented in this paper. In the device, a two-port SAW resonator with Nafion coating was used. To increase the sensitivity of the sensor, the higher resonator harmonics have been employed. The sensor exhibits a very high sensitivity and linearity as well as relatively short response time. Due to the Nafion properties, it is extremely resistant to chemical compound interactions, e.g., it can operate in the atmosphere with sulfur dioxide, acidic and alkaline vapors, strong oxidizing agents, and dust.

High temperature LGS SAW gas sensor

Novel surface acoustic wave (SAW) devices using the recent langasite (LGS) family of crystals have been designed, fabricated, and tested for high temperature (up to 750 °C) gas sensor applications. The devices were fabricated using platinum (Pt) and palladium (Pd) thin film technology as electrodes and sensing films to withstand temperatures in excess of 1000 °C. Combinations of platinum and platinum/tungsten trioxide (Pt/WO 3) films have been used in the detection of C 2H 4 in N 2 (C 2H 4/N 2). Original all palladium metallic structures have been employed in the detection of H 2 in a N 2 carrier gas (H 2/N 2). SAW resonator structures using these films have been fabricated and continuously cycled from 250 to 750 °C for periods up to 3 weeks, with degradations in the |S 21| response up to 7 dB. Constantly held at 250 °C for 12 weeks, the maximum degradation in the |S 21| observed dropped to 3 dB. In order to perform the required gas testing, a high temperature, air sealed, stainless steel, dual chamber has been designed and fabricated to house these devices. The two-port SAW resonator structures fabricated with Pt, Pt/WO 3, and the original all-Pd films mentioned above have been tested with exposures to H 2/N 2 and C 2H 4/N 2 in the temperature range of 250–450 °C. Frequency variations up to 10 kHz for the 167 MHz high temperature SAW sensors were measured. The high temperature LGS SAW devices and experiments reported in this work show the capability of these devices to withstand prolonged exposure to temperatures ranging from 250 to 750 °C and to perform as high temperature gas sensors.

Linear frequency tuning of SAW resonators

Frequency tuning in SAW (surface acoustic wave) resonator-stabilized oscillators is normally accomplished via utilization of a voltage-controlled phase shifter. The design of abrupt junction varactor diode-inductor networks which employ impedance transformation techniques to obtain linear frequency tuning of two-port SAW resonators is reported. The approach is similar to that previously developed for linear tuning of bulk wave, quartz crystal resonators. This technique uses varactor diode parallel inductance to provide a linear reactance versus voltage network, which is effectively connected in series with the resonator motional impedance in order to tune the effective resonator center frequency. Typical tuning ranges are significantly larger than those achievable using the phase shifter approach, and are on the order of 400 ppm for the 320-MHz resonator used.

Modelling the transverse-mode response of a two-port SAW resonator

An equation is derived for the transverse-mode frequencies of a two-port surface-acoustic-wave (SAW) resonator with uniform reflection gratings. It is postulated that only odd-order (symmetric) transverse modes should be excited in such a grating, due to its symmetrical placement with respect to the interdigital transducer (IDT). Frequency response modeling involves a summation of one-dimensional transmission-matrix computations for the fundamental mode and participating transverse ones. Excellent agreement is obtained between theory and experiment for a 360-MHz resonator with three close-in transverse modes, attributed to symmetric modes of odd order m=3, 5, 7.

High Q metal strip SSBW resonators using a SAW design

An experimental study of metal strip surface skimming bulk wave (SSBW) resonators using a surface acoustic wave (SAW) design is presented. Characteristics of SSBW and SAW resonators fabricated with the same photolithographic mask are compared and discussed. High Q low-loss SSBW resonators are achieved using a conventional two-port SAW resonator design and taking special care of the distance L between both interdigital transducers, the metal thickness h/lambda (lambda=acoustic wavelength) and the finger-to-gap ratio. Best overall performance of the SSBW devices in this study is achieved at L=nlambda/2-lambda/4 (compared with L=nlambda/2-lambda/8 for SAW resonators), h /lambda=1.6% (compared with 2% for SAW), and finger-to-gap ratio close to 1. The best device fabricated shows an unloaded Q of 5820 and an insertion loss of 7.8 dB at 766 MHz. The SSBW resonant frequency shows a stronger dependence on the metal thickness than the SAW one. This problem, however, is readily solved by frequency trimming using a CF(4) plasma etching technique. SSBW resonator can be trimmed by 0.2% down in frequency (compared with 0.05% for SAW) without affecting their performance.