Abstract The parameters of the depth profiles of Sb atoms implanted into titanium were measured using standard RBS technique. The measured profile moments are compared with theoretical values calculated by means of TRIM program. The experimental projected ranges are lower by 15–25% than the theoretical ones but these differences may partly be explained by target sputtering. The measured range stragglings agree with those calculated within few percent. Extremely high values of profile skewness and kurtosis are found for shallow profiles.