Transmission Electron Microscopy Sample Research Articles

An electron energy loss spectrometer based streak camera for time resolved TEM measurements

We propose an experimental setup based on a streak camera approach inside an energy filter to measure time resolved properties of materials in the transmission electron microscope (TEM). In order to put in place the streak camera, a beam sweeper was built inside an energy filter. After exciting the TEM sample, the beam is swept across the CCD camera of the filter. We describe different parts of the setup at the example of a magnetic measurement. This setup is capable to acquire time resolved diffraction patterns, electron energy loss spectra (EELS) and images with total streaking times in the range between 100ns and 10μs.

TEM sample preparation by femtosecond laser machining and ion milling for high-rate TEM straining experiments

To model mechanical properties of metals at high strain rates, it is important to visualize and understand their deformation at the nanoscale. Unlike post mortem Transmission Electron Microscopy (TEM), which allows one to analyze defects within samples before or after deformation, in situ TEM is a powerful tool that enables imaging and recording of deformation and the associated defect motion during mechanical loading. Unfortunately, all current in situ TEM mechanical testing techniques are limited to quasi-static strain rates. In this context, we are developing a new test technique that utilizes a rapid straining stage and the Dynamic TEM (DTEM) at the Lawrence Livermore National Laboratory (LLNL). The new straining stage can load samples in tension at strain rates as high as 4×103/s using two piezoelectric actuators operating in bending while the DTEM at LLNL can image in movie mode with a time resolution as short as 70ns. Given the piezoelectric actuators are limited in force, speed, and displacement, we have developed a method for fabricating TEM samples with small cross-sectional areas to increase the applied stresses and short gage lengths to raise the applied strain rates and to limit the areas of deformation. In this paper, we present our effort to fabricate such samples from bulk materials. The new sample preparation procedure combines femtosecond laser machining and ion milling to obtain 300µm wide samples with control of both the size and location of the electron transparent area, as well as the gage cross-section and length.

Microstructure and defect analysis in the vicinity of blisters in polycrystalline tungsten

Up to now, analyzing the production of dislocation-type defects in the subsurface region of plasma or ion-exposed tungsten samples has been hampered by the challenging production of suitable cross-section samples for transmission electron microscopy. We present two reliable methods based on precision electropolishing to prepare cross-sections of tungsten that allow direct imaging of dislocation-type defects by scanning as well as by transmission electron microscopy. Using these methods, we are able to demonstrate a clear enhancement of the dislocation density in the caps of blisters on tungsten exposed to H isotope plasma, i.e., of surface morphologies that are correlated to subsurface cavities. As a benchmark, we also show a cross-section of tungsten irradiated by 20 MeV W6+ ions.

Microstructure Observations of Graphite in Gray Cast Iron Using TEM

Cast iron is an iron alloy mainly composed of carbon and silicon, the amount of carbon is more than 2.1 mass%. Cast irons, gray cast iron and ductile cast iron, have been used as industrial parts and automobile parts widely because they have a good wear resistance and an excellent machinability. Graphite formation mechanism have been proposed, but, it is not established clearly yet. In this study, the microstructure of flake graphite was investigated to reveal the graphite formation mechanisms using FC250 alloy. Transmission electron microscopy (TEM) samples were prepared using focused ion beam (FIB). In the case of a cross section of flake graphite taken perpendicular to its elongated direction using TEM, internal microstructure of flake graphite was observed layered structure. In the case of a cross section of flake graphite taken parallel to its elongated direction, clear microstructure was not observed. Selected area electron diffraction (SAED) from flake graphite showed <0001> direction of graphite are mostly parallel to their thickness.

Novel method for measurement of transistor gate length using energy-filtered transmission electron microscopy

As the feature size of devices continues to decrease, transmission electron microscopy (TEM) is becoming indispensable for measuring the critical dimension (CD) of structures. Semiconductors consist primarily of silicon-based materials such as silicon, silicon dioxide, and silicon nitride, and the electrons transmitted through a plan-view TEM sample provide diverse information about various overlapped silicon-based materials. This information is exceedingly complex, which makes it difficult to clarify the boundary to be measured. Therefore, we propose a simple measurement method using energy-filtered TEM (EF-TEM). A precise and effective measurement condition was obtained by determining the maximum value of the integrated area ratio of the electron energy loss spectrum at the boundary to be measured. This method employs an adjustable slit allowing only electrons with a certain energy range to pass. EF-TEM imaging showed a sharp transition at the boundary when the energy-filter’s passband centre was set at 90 eV, with a slit width of 40 eV. This was the optimum condition for the CD measurement of silicon-based materials involving silicon nitride. Electron energy loss spectroscopy (EELS) and EF-TEM images were used to verify this method, which makes it possible to measure the transistor gate length in a dynamic random access memory manufactured using 35 nm process technology. This method can be adapted to measure the CD of other non-silicon-based materials using the EELS area ratio of the boundary materials.

Liquid-solid phase transition of Ge-Sb-Te alloy observed by in-situ transmission electron microscopy

Melting and crystallization dynamics of the multi-component Ge-Sb-Te alloy have been investigated by in-situ transmission electron microscopy (TEM). Starting point of the phase transition study is an ordered hexagonal Ge1Sb2Te4 thin film on Si(111) where the crystal structure and the chemical composition are verified by scanning TEM and electron energy-loss spectroscopy, respectively. The in-situ observation of the liquid phase at 600°C including the liquid-solid and liquid-vacuum interfaces and their movements was made possible due to an encapsulation of the TEM sample. The solid-liquid interface during melting displays a broad and diffuse transition zone characterized by a vacancy induced disordered state. Although the velocities of interface movements are measured to be in the nanometer per second scale, both, for crystallization and solidification, the underlying dynamic processes are considerably different. Melting reveals linear dependence on time, whereas crystallization exhibits a non-linear time-dependency featuring a superimposed start-stop motion. Our results may provide valuable insight into the atomic mechanisms at interfaces during the liquid-solid phase transition of Ge-Sb-Te alloys.

Gentle transfer method for water- and acid/alkali-sensitive 2D materials for (S)TEM study

We report a method in making transmission electron microscopy sample for both CVD-grown and exfoliated 2D materials without etching process, thus gentle to those 2D materials that are sensitive to water and reactive etchants. Large-scale WS2 monolayer grown on glass, NbS2 atomic layers grown on exfoliated h-BN flakes, and water-sensitive exfoliated TiS2 flakes are given as representative examples. We show that the as-transferred samples not only retain excellent structural integrity down to atomic scale but also have little oxidations, presumably due to the minimum contact with water/etchants. This method paves the way for atomic scale structural and chemical investigations in sensitive 2D materials.

The Application of Paraphenylenediamine Staining for Assessment of Phospholipidosis.

Drug-induced phospholipidosis is characterized by intracellular accumulation of phospholipids with lamellar bodies in cells exposed to xenobiotics. Demonstration of the lamellar bodies by transmission electron microscopy (TEM) is the hallmark for a definitive diagnosis of phospholipidosis. However, the preparation of tissue samples for TEM and their ultrastructural evaluation are technically challenging and time consuming. Paraphenylenediamine (PPD) is essentially a fat stain, and the staining mechanism is based upon the osmication of unsaturated lipids. Thus, the application of PPD staining to osmicated tissue samples is considered an optimal way to identify lipids. We evaluated the potential of PPD staining to localize phospholipid accumulations on osmium-fixed semi-thin tissue sections of the lung, kidney, and liver, which were affected with phospholipidosis, under a light microscope. PPD staining revealed the presence of PPD positive dark fine granular material in the cytoplasm for all affected tissues examined, which correlated ultrastructurally with lamellar bodies as well as a light microscopic finding of cytoplasmic vacuolation. The great advantage of PPD is that it can be incorporated into the protocol for standard TEM tissue preparation and significantly improve the efficiency of TEM work. In conclusion, PPD provides a simple, sensitive, and reliable method for visualizing phospholipid accumulation on light microscopy and represents an easy tool to study drug-induced phospholipidosis.

Fabrication of thin TEM sample of ionic liquid for high-resolution ELNES measurements

Investigation of the local structure, ionic and molecular behavior, and chemical reactions at high spatial resolutions in liquids has become increasingly important. Improvements in these areas help to develop efficient batteries and improve organic syntheses. Transmission electron microscopy (TEM) and scanning-TEM (STEM) have excellent spatial resolution, and the electron energy-loss near edge structure (ELNES) measured by the accompanied electron energy-loss spectroscopy (EELS) is effective to analyze the liquid local structure owing to reflecting the electronic density of states. In this study, we fabricate a liquid-layer-only sample with thickness of single to tens nanometers using an ionic liquid. Because the liquid film has a thickness much less than the inelastic mean free path (IMFP) of the electron beam, the fine structure of the C-K edge electron energy loss near edge structure (ELNES) can be measured with sufficient resolution to allow meaningful analysis. The ELNES spectrum from the thin liquid film has been interpreted using first principles ELNES calculations.

Small versus Large Iron Oxide Magnetic Nanoparticles: Hyperthermia and Cell Uptake Properties.

Efficient use of magnetic hyperthermia in clinical cancer treatment requires biocompatible magnetic nanoparticles (MNPs), with improved heating capabilities. Small (~34 nm) and large (~270 nm) Fe3O4-MNPs were synthesized by means of a polyol method in polyethylene-glycol (PEG) and ethylene-glycol (EG), respectively. They were systematically investigated by means of X-ray diffraction, transmission electron microscopy and vibration sample magnetometry. Hyperthermia measurements showed that Specific Absorption Rate (SAR) dependence on the external alternating magnetic field amplitude (up to 65 kA/m, 355 kHz) presented a sigmoidal shape, with remarkable SAR saturation values of ~1400 W/gMNP for the small monocrystalline MNPs and only 400 W/gMNP for the large polycrystalline MNPs, in water. SAR values were slightly reduced in cell culture media, but decreased one order of magnitude in highly viscous PEG1000. Toxicity assays performed on four cell lines revealed almost no toxicity for the small MNPs and a very small level of toxicity for the large MNPs, up to a concentration of 0.2 mg/mL. Cellular uptake experiments revealed that both MNPs penetrated the cells through endocytosis, in a time dependent manner and escaped the endosomes with a faster kinetics for large MNPs. Biodegradation of large MNPs inside cells involved an all-or-nothing mechanism.

Cross-Sectional Transmission Electron Microscopy Sample Preparation of Soldering Joint Using Ultramicrotomy

Many studies have reported the interfacial reaction of Sn-Ag/ electroless nickel immersion gold (ENIG). Various analysis techniques, such as scanning electron microscopy, electron probe microanalyzer, and transmission electron microscopy (TEM), have been used to examine interfacial reaction. Among them, TEM equipped with analytical attachments offers the most complete tool for characterizing the formation of intermetallic compounds (IMCs) at the interface. However, solders are typically soft and ductile, while IMCs tend to be quite hard and brittle, which has limited the level of success in preparing TEM samples. We utilized ultramicrotomy since it might offer a reasonable and relatively quick alternative in this case. Ultramicrotomy has been used for the preparation of TEM specimens from biological materials and extending a range of materials including polymers, coating layer, particles, and even metals (Becker & Bange, 1993; Glanvill, 1995; Howell et al., 1995). TEM sample making to section hard materials by ultramicrotomy are not new. Besides, it has been traditionally considered that the mechanical damage during sectioning by diamond knife might hinder unambiguous specimen characterization. However, this technique also has many advantages such as no ion beam irradiation damage, no chemical mixing, no differential thinning rate and the ease of preparation of many serial sections with large, thin areas of uniform thickness in a relatively short time (Quintana, 1997). The increasing acceptability of ultramicrotomy in materials science is evidenced by a number of recent paper giving results for different hard materials (Hwang & Suganuma, 2003).

TEM Study of the Ionomer/Catalyst Interface and 3D Pore Structure of Catalyst Layer for PEMFC

Proton exchange membrane fuel cells (PEMFCs) are promising energy conversion devices due to their high efficiency, high energy density and low operating temperatures [1]. One of the major obstacles for high performance PEMFCs is that the sluggish oxygen reduction reaction (ORR) and the ORR activity in a membrane electrode assembly (MEA) are dependent of the structure of the ionomer/catalyst interface in catalyst layers. Coverage of the ionomer over the surface of catalyst particles and the thin ionomer film over the catalyst particles, as well as the porosimetry of the catalyst layer are critical factors to be considered in the fabrication of MEAs. Clearly, the determination of ionomer coverage over the surface of the catalyst particles, the morphology of ionomer film over the surface of catalyst particles and porosimetry of catalyst layer of MEAs are of paramount significance for developing high performance and low cost MEAs. Transmission electron microscopy (TEM) is a powerful tool to provide direct observations of the structures. In this work, we present the TEM analysis of MEAs for (1) ionomer coverage over carbon particles, (2) the thickness of ionomer film over carbon particles and (3) the porosimetry of catalyst layer using different TEM techniques. MEAs with different functional groups (which were chemically grafted on the surface of carbon support particles via diazonium reactions) were fabricated using (1) NH3 +- functionalized carbon black (CB) and (2) SO3 - functionalized CB. These two types of MEAs were analyzed in terms of ionomer/catalyst interface and porosimetry. In order to prepare electron transparent TEM samples, different methods were applied, including normal/partial embedding ultra-microtomy and cryo-microtomy. Figure 1 show scanning transmission electron microscopy (STEM) images of catalyst layers (CLs) of two MEAs, as well as energy-dispersive X-ray spectroscopy (EDS) mapping of the same area. Combining these results, it is evident that the fluorine in the NH3 +- functionalized carbon CL is uniformly distributed over the entire region. Meanwhile, the SO3 - functionalized carbon CL (as circled in Figure 1c) shows non-uniform distribution; the F signal is much weaker in some areas than others or even disappeared. These maps indicate that the NH3 +- functionalized carbon CL has better ionomer coverage than that of the SO3 - functionalized carbon CL. On the other hand, the X-ray spectra of both samples are shown in Figure 2. The C/F ratio in NH3 +- functionalized carbon CL is 216 while it is only 16 in SO3 - functionalized carbon CL. Such a large discrepancy in the C/F ratio between two different CLs are mainly due to the CL’s intrinsic property - the ionomer coverage difference - as these two TEM samples were prepared using the same method. As these two MEAs are prepared with the same catalyst support/ionomer ratio, higher C/F signal ratio in NH3 +- functionalized carbon CL indicates more complete coverage and thinner ionomer layer. An overview of catalyst layers in both CLs is shown by the TEM bright-field images in Figure 3. The thickness of catalyst layer made of NH3 +- functionalized CB is approximately 6.3μm, while it is only approximately 1.4 μm of that made of SO3 - functionalized CB. It suggests that the carbon support aggregates are much smaller in the catalyst layer made of NH3 +- functionalized CB, based on the fact that two MEAs are synthesized with same amounts of carbon supports and ionomer. Furthermore, 3D tomography TEM and reconstruction of both MEAs based on focused ion beam (FIB) supports this conclusion. Highly porous catalyst layer of NH3 +- functionalized CB facilitates mass transport for both reactants (H2 and O2) to reach reactive sites and water dissipated out. In summary, TEM characterization shows that NH3 +- functionalized CB catalyst layer has better ionomer coverage, thinner ionomer layer, as well as better porosimetry than SO3 - functionalized CB catalyst layer. In consistency with the TEM characterizations, the NH3 +- functionalized CB MEA provide better electrochemical performance. Reference [1] Kocha, S. S. Principles of MEA preparation. In Handbook of Fuel Cells − Fundamentals, Technology and Applications, ed. 1; Vielstich, W., Lamm, A., Gasteiger, H. A., Eds.; Wiley: Chichester, UK, 2003; Vol. 3, 538 Figure 1

Fabrication of high aspect ratio AFM probes with different materials inspired by TEM “lift-out” method

The most commonly used materials in all commercially available high-aspect-ratio (HAR) nanowire's (NW) tips are made of silicon and carbon nanotube which limit their applications in other types of atomic force microscopy (AFM), such as conducting AFM and magnetic force microscope. Therefore, a simple process inspired by cross-sectional transmission electron microscopy sample preparation method was used to demonstrate the feasibility of fabricating HAR AFM probes, which can easily define the tilt angle of the NW tip with respect to the direction that is normal to the axis of the cantilever to which it is attached by simply tilting the sample stage where the cantilever is placed. This is very important as it enables precise control of the inclination angle of the NW tip and allows the tip to be made perpendicular to the probed surface for scanning with different AFM mounts. Two different tips were fabricated, one attached parallel and the other attached at an angle of 13° with respect to the normal of the cantilever axis. These tips were used to profile the topography of a silicon nanopillar array. Only the probe attached at an angle of 13° allowed mapping of the topography between nanopillars. This is the first successful demonstration of an HAR AFM tip being used to map the topography of a nanopillar array. In addition, the authors also demonstrated that this method can be extended to fabricate HAR AFM tips of different materials such as copper with a slightly modified approach.

Structure and magnetic properties of Zr–Mn substituted strontium hexaferrite Sr(Zr,Mn) x Fe12−2x O19 nanoparticles synthesized by sol–gel auto-combustion method

In this research, nano-sized powders of Zr–Mn substituted strontium hexaferrite (Sr(Zr,Mn) x Fe12−2x O19 (x = 0, 2, 2.5, 3)) were synthesized by sol–gel auto-combustion route using subsequent heat treatment. The samples were characterized using X-ray diffraction (XRD), Fourier transform infrared spectroscopy (FTIR), field emission scanning electron microscope (FESEM), transmission electron microscopy (TEM), Mössbauer spectroscopy and vibration sample magnetometer (VSM) techniques. XRD and Mössbauer spectroscopy results revealed formation of Sr(Zr,Mn) x Fe12−2x O19 accompanied with Mn δ Fe2−δ O4 lateral phase in the samples. Also, FTIR and XRD results demonstrated presence of SrO impurity phase. FESEM micrographs show particle size reduction and presence of two distinct powder morphologies with different brightness levels with Zr4+ and Mn2+ substitutions which approves existence of lateral phases in the substituted samples. TEM micrographs show nanometric particles with sizes smaller than 100 nm with high crystallinity. Mössbauer results showed that at low level of substitution, Zr4+ ions prefer to occupy both 4f1 and 2b however, at higher level of substitution, they prefer exclusively 4f1 site. While, Mn2+ ions distributed approximately equally between 12k and 2a sites. The presence of nonmagnetic Zr4+ cation leads to decrease in exchange interaction, especially at 12k and 2a sites. VSM results showed decrement of coercivity force ( i H c ) from 5593.60 to 3282.46 Oe and maximum magnetization from 62.60 to 46.15 emu g−1, respectively, by increment of Zr–Mn substitution values. Variations in maximum magnetization magnitude have been explained on the basis of occupation of the substituted cations at different iron sites.

Dust to dust: Evidence for the formation of “primary” hematite dust in banded iron formations via oxidation of iron silicate nanoparticles

Conventional models for the deposition of banded iron formations (BIFs) envisage the oxidation of upwelled ferrous iron and the precipitation of ferric oxide/hydroxide particles in surface waters that settled to form laterally extensive layers of iron-rich sediment. A fundamental tenet of this model is that fine-grained hematite (so-called dusty hematite) in least-altered BIFs represents the dehydration product of original oxide/hydroxide precipitates. However, this premise has never been proven. We have investigated the origin of the earliest-formed iron oxides in chert in well-preserved BIFs of the 2.63–2.45 billion-year-old Hamersley Group, Australia. We find that laminated chert in BIFs show progressive stages of in situ alteration from gray–green chert, containing iron-silicate nanoparticles, to red chert with abundant hematite dust. Analysis of textures by transmission electron microscopy of samples from the transition zone between gray–green and red chert reveals that dusty hematite formed after partial dissolution of iron-silicate nanoparticles by the precipitation of iron oxides in resulting cavities. These observations suggest that hematite dust is not a relict of an original seawater precipitate but the end-product of post-depositional oxidation. Our observations are consistent with paleomagnetic results from the Hamersley Group, which record two major phases of magnetic remanence carried by hematite that post-date deposition by more than 200 million years. Our results may provide an alternative explanation for the origin of jasper in BIFs deposited before the start of the Great Oxidation Event about 2.4 billion years ago. If correct, it follows that hematite dust is not a reliable proxy for paleoenvironmental conditions or biological processes in early Precambrian seawater. Furthermore, our results suggest that the primary iron precipitate in BIFs was iron-silicate mud that was silicified at or just below the sediment–water interface, a hypothesis that requires neither dissolved oxygen nor photosynthetic life, but was an inorganic, chemical process, reflecting anoxic oceans enriched in iron and silica.

Transmission Electron Microscopy Specimen Preparation of Delicate Materials Using Tripod Polisher

Transmission electron microscopy (TEM) is a powerful tool for analyzing a broad range of materials and provides localized information about the microstructure. However, the analysis results are strongly influenced by the quality of the thin foil specimen. Sample preparation for TEM analysis requires considerable skill, especially when the area of interest is small or the material of interest is difficult to thin because of its high hardness and its mechanical instability when thinned. This article selectively reviews recent advances in TEM sample preparation techniques using a tripod polisher. In particular, it introduces two typical types (fl at type and wedge type) of TEM sample preparation and the benefits and drawbacks of each method; finally, a method of making better samples for TEM analysis is suggested.

Morphological degradation of human hair cuticle due to simulated sunlight irradiation and washing

Morphological changes in hair surface are undesirable, since they cause shine loss, roughness increase and split ends. These effects occur more frequently in the cuticle, which is the outermost layer of the hair strand, and thus the most exposed to the environmental damages. Sunlight irradiation contributes significantly to these morphological alterations, which motivates the investigation of this effect on hair degradation. In this work, the influence of irradiation and hand-washing steps on the morphology of pigmented and non-pigmented hair cuticle was investigated using field emission scanning electron microscopy (FESEM) and transmission electron microscopy (TEM). To simulate daily conditions, where hair is hand-washed and light exposed, samples of dark brown and gray hair underwent three different conditions: 1) irradiation with a mercury lamp for up to 600h; 2) irradiation with the mercury lamp combined with washes with a sodium lauryl sulphate solution; and 3) only washing. A new preparation procedure was applied for TEM samples to minimize natural variations among different hair strands: a single hair strand was cut into two neighbouring halves and only one of them underwent irradiation and washing. The non-exposed half was used as a control, so that the real effects caused by the controlled irradiation and washing procedures could be highlighted in samples that had very similar morphologies initially. More than 25images/sample were analysed using FESEM (total of 300 images) and ca. 150images/sample were obtained with TEM (total of 900 images). The results presented herein show that the endocuticle and the cell membrane complex (CMC) are the cuticle structures more degraded by irradiation. Photodegradation alone results in fracturing, cavities (Ø≈20–200nm) and cuticle cell lifting, while the washing steps were able to remove cuticle cells (≈1–2 cells removed after 60 washes). Finally, the combined action of irradiation and washing caused the most severe damages, resulting in a more pronounced cuticle extraction (≈1–4 cuticle cells after a 600h irradiation and a 60 times washing). This irradiation dose corresponds to ca. 2months of sunlight exposure (considering 5h/day) in Campinas-SP, Brazil, during the day period of maximum irradiation intensity. The combined action of irradiation and washing can be explained by the creation of fragile photodegraded spots in the endocuticle and in the CMC, where the mechanical stress associated to the washing steps are more prone to induce rupture.

Non-octahedral-like dislocation glides in aluminum induced by athermal effect of electric pulse

Abstract

Preparation and characterization of magnetic fluorescent microspheres for delivery of kaempferol

This study focused on the preparation and characterization of magnetic fluorescent microspheres (MFMs) for delivery of kaempferol. Magnetic microspheres were prepared by miniemulsion polymerization in the presence of Fe3O4 ferrofluids and kaempferol, and then, the microspheres were modified with amino-functionalized graphene quantum dots through chemically bonding. The properties of as-obtained MFMs were characterized by Fourier-transform infrared spectrum, transmission electron microscopy, thermogravimetric analysis and vibration sample magnetometry and X-ray fluorescence spectrometry. It was found that the superparamagnetic microspheres had ultrafine size (below 120 nm), high saturation magnetization of 32.48 emu/g, and significant fluorescence. Then, MFMs were used as a carrier to delivery of kaempferol, and the results indicated that they had a favourable release property for kaempferol. Finally, by incorporating the MFMs with Hela cells, they could efficiently induce inhibitory effect on Hela cells.

FEI Helios NanoLab 400S FIB-SEM

The FEI Helios NanoLab400S FIB-SEM is one of the world's most advanced DualBeamTM focused ion beam (FIB) platforms for transmission electron microscopy (TEM) sample preparation, scanning electron microscopy (SEM) imaging and analysis in semiconductor failure analysis, process development and process control. The FEI Helios NanoLab400S FIB-SEM combines an ElstarTM electron column for high-resolution and high-contrast imaging with a high-performance SidewinderM ion column for fast and precise cross sectioning. The FEI Helios NanoLab M 400S is optimised for high throughput high-resolution S/TEM sample preparation, SEM imaging and energy dispersive X-ray analysis. Its exclusive FlipStageTM and in situ STEM detector can flip from sample preparation to STEM imaging in seconds without breaking vacuum or exposing the sample to the environment. Platinum gas chemistry is the preferred metal deposition when a high deposition rate and precision of the deposition are required. Carbon deposition can be chosen as well. The system additionally allows for spatially resolved compositional analysis using the attached EDAX Genesis XM 4i X-ray microanalysis system.