Abstract
We report a method in making transmission electron microscopy sample for both CVD-grown and exfoliated 2D materials without etching process, thus gentle to those 2D materials that are sensitive to water and reactive etchants. Large-scale WS2 monolayer grown on glass, NbS2 atomic layers grown on exfoliated h-BN flakes, and water-sensitive exfoliated TiS2 flakes are given as representative examples. We show that the as-transferred samples not only retain excellent structural integrity down to atomic scale but also have little oxidations, presumably due to the minimum contact with water/etchants. This method paves the way for atomic scale structural and chemical investigations in sensitive 2D materials.
Highlights
The rich electronic properties in the family of two-dimensional (2D) materials make them attractive for fundamental research
We examined the as-transferred samples made from large-scale WS2 monolayer grown on glass and NbS2 atomic layers grown on h-BN flakes exfoliated onto SiO2/Si wafer by high resolution scanning transmission electron microscopy (STEM)
Since the method minimizes the use of water in all the procedures, we successfully demonstrate for the first time that non-oxidized TiS2 atomic layers with sharp edges, a well-known water sensitive 2D material, are observable, as evidenced by electron energy loss spectrum
Summary
The rich electronic properties in the family of two-dimensional (2D) materials make them attractive for fundamental research. We examined the as-transferred samples made from large-scale WS2 monolayer grown on glass and NbS2 atomic layers grown on h-BN flakes exfoliated onto SiO2/Si wafer by high resolution scanning transmission electron microscopy (STEM).
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