In this study, the effective fabrication of tin oxide (SnO₂) one-dimensional nanostructures in the form of distinct nanorods by DC sputtering was reported, marking the first clear achievement of this morphology using this method. These nanorod-based structures were applied as a sensing layer for nitrogen dioxide (NO₂) gas. The SnO₂ nanorods were grown under controlled substrate temperature conditions, with a deposition rate of 2 nm/min. It is to be emphasized that the best growth occurred at a temperature of 350 °C. Their structure was determined by FESEM and surface area techniques. The sensor response to the oxidizing NO2 was investigated by a temperature-programmed dynamic system. The surface area measurements by low vapor Kr gas showed for the films synthesized at 200 °C, 350 °C, and 500 °C values of 1.2 × 103, 2.3 × 103, and 1.2 × 103 cm2/g, respectively. Particularly, the sensor utilizing the one-dimensional nanostructures prepared at 350°C showed a high response at low temperatures of NO2 adsorption. For example, when the device was exposed to 2.0 ppm of target gas of the 350 °C-sensor, the response was around 90 (9000 %), while that of the 500 °C and 200 °C were 80 and 15, correspondingly.
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