Auger electron spectroscopy (AES) combined with ion sputtering was used to study the chemical composition of Nb–Al2O3–Nb thin film sandwiches. Attention was focused on the interfaces between the aluminum oxide and the two niobium films, because they are responsible for the electrical quality of the Josephson junctions based on these sandwiches. The real composition of the analyzed interfaces as a function of thickness was reconstructed from the AES signal intensities versus time data through an approximate conversion method. The obtained results show that the niobium layers adjacent to these interfaces are less pure than the rest of the films, due to aluminum and oxygen diffusion: a gradual aluminum diffusion up to 10–20 nm in the base niobium film was found.
Read full abstract